Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 19-26, 1995 DOI10.1116/1.587978 Export Citation Focused-Ion-Beam Implantation of Ga in Elemental and Compound Semiconductors Gnaser H, Kallmayer C, Oechsner H Keywords:RESOLUTION;MICROPROBE;SURFACES;SILICON;SI Please enable JavaScript to view the comments powered by Disqus.
