Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 43-54, 1995 DOI10.1116/1.587983 Export Citation Patterned, Photon-Driven Cryoetching of GaAs and AlGaAs Shih MC, Freiler MB, Scarmozzino R, Osgood RM Keywords:SCHOTTKY BARRIERS;CHARGE-TRANSFER;QUANTUM DOTS;ION;CHLORINE;SURFACES;DAMAGE;SYSTEM;GAAS(110);EPITAXY Please enable JavaScript to view the comments powered by Disqus.
