Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 923-927, 1995 DOI10.1116/1.588207 Export Citation Characterization of Sidewall Defects in Selective Epitaxial-Growth of Silicon Bashir R, Neudeck GW, Haw Y, Kvam EP, Denton JP Keywords:LATERAL OVERGROWTH;BIPOLAR-TRANSISTOR;MOS Please enable JavaScript to view the comments powered by Disqus.
