Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1353-1357, 1995 DOI10.1116/1.587852 Export Citation Cross-Sectional Characterization of Thin-Film Transistors with Transmission Electron-Microscopy Tsuji S, Tanaka M, Iwama H, Tsutsui N, Kuroda K, Saka H Please enable JavaScript to view the comments powered by Disqus.
