MicroRaman spectroscopy is used for studying patterning induced structural damage in PLD (Pulsed Laser Deposition) YBaCuO High T-c superconductor thin films. The study was focused on the oxygen sublattice vibrations, which give information about different structural aspects of the films. A significant oxygen loss and the presence of residual stresses for laser ablation and ion etching patterning procedures were found. No appreciable consequences at the microRaman resolution scale were detected when patterning was done by wet etching with EDTA (Ethylene Diamine Tetra Acetic Acid).