Copper-phthalocyanine (CuPc) and magnesium-phthalocyanine (MgPc) were alternatively deposited on silicon substrates by organic molecular beam deposition. The thickness of each layer was varied in the range 3.0-10.0 nm. The layered structure of the film was confirmed by secondary ion mass spectrometry depth profiling and cross-sectional observations with a transmission electron microscope. The molecular orientation within a film was estimated by Fourier transform IR spectroscopy. The measurements suggested that the planar molecules of CuPc and MgPc were inclined at an angle of 22 degrees with respect to the substrate surface.