Lead zirconate titanate, Pb(Zr0.52Ti0.48)O-3 (PZT) thin film with a thin PbTiO3 template layer was successfully fabricated onto Pt/RuO2 hybrid electrode by using a new alkoxide-alkanolamine sol-gel method, The resulting film showed a well-developed dense grain structure with uniform distribution. It was observed that the use of Pt/RuO2? hybrid electrode helped reduce the amount of the Pb2Ru2O7-x second phase as well as the leakage current by about three orders of magnitude. Typical P-E hysteresis loops were observed even at the low applied voltage of 5 V and the measured values of 2P(s), 2P(r) and 2E(c) were 93 mu C/cm(2), 48 mu C/cm(2) and 78 kV/cm, respectively. Polarization versus fatigue characteristics showed little degradation up to 10(11) cycles.