Materials Science Forum, Vol.338-3, 193-196, 2000
Homoepitaxial growth of 6H SiC on single crystalline spheres
Growth of homoepitaxial layers has been performed by chemical vapor deposition on 6H SiC spheres ground from modified Lely crystals. We used such a sphere as substrate which provides naturally all crystallographic orientations in order to obtain an overview over the homoepitaxial growth in different directions. From scanning electron micrographs we could determine 6 pronounced crystallographic bands running from the (0001) Si pole to the (000 (1) over bar) C pole along <1 (1) over bar 0x > directions. Around the (0001) Si and (000 (1) over bar) C poles smooth growth planes have developed. The bands show a stair-like character consisting of treads and risers with surface normals parallel to the <1 (1) over bar 00 >- and < 11 (2) over bar0 > -directions, respectively. Between the bands a rough topology consisting of terraces is observed. Concerning the growth rates of the different directions we find the < 11 (2) over bar0 > as the fastest, followed by <1 (1) over bar 00 >. The (000+1) planes grow slowest.
Keywords:chemical vapor deposition;growth anisotropy;non-planar substrates;transmission electron microscopy