화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 687-690, 2000
Electroluminescence from implanted and epitaxially grown pn-diodes
The electroluminescence from pn-diodes with (1) aluminum doped epitaxially grown, (2) aluminum implanted or (3) aluminum and boron implanted p-layer have been investigated. The temperature dependence for both the spectra and the decays of the major spectral components have been investigated at temperatures from 80 K to 550 K. The implanted diodes show implantation damage in the form of the D-1 center and lack of emission from the aluminum center. The epitaxial diodes show luminescence from the aluminum center. The band edge luminescence is visible above 150 K for the epitaxial diode and above 300 K for the implanted. The emission from deep boron can be seen in the aluminum and boron co-implanted diode and in the epitaxially grown diode that have an unintentional boron doping below 10(17) cm(-3).