화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 1363-1366, 2000
Study of the breakdown voltage of protected or non-protected 6H-SiC bipolar diodes by OBIC characterisation
The OBIC (Optical Beam Induced Current) method and its application to study SiC implanted diodes protected or not by JTE are presented in this paper. These measurements associated to the simulation results illustrate the effects of the periphery emitter doping profile on the electric field distribution and give information concerning the operation of the Boron implanted JTE on the breakdown voltage.