화학공학소재연구정보센터
Thin Solid Films, Vol.375, No.1-2, 95-99, 2000
PZT ceramic/ceramic 0-3 nanocomposite films for ultrasonic transducer applications
Lead zirconate titanate (PZT) ceramic/ceramic 0-3 nanocomposite films of several micron thickness were fabricated using a modified sol-gel process. Nanosized PZT powder was dispersed in a PZT solution which was spin-coated onto stainless steel or silicon substrates to form composite films. The crystallization of the films was studied by X-ray diffraction. The dielectric permittivities and ferroelectric properties of the PZT films deposited on stainless steel substrates were also investigated.