화학공학소재연구정보센터
Applied Chemistry, Vol.6, No.2, 623-626, November, 2002
이온 충격에 의한 스퍼터링에 관한 연구
A Study on the Sputtering by Ion Bombardment.
During the past century, there have been many manuscripts published reporting different aspect of sputtering. The purpose of this article is to review the theories of sputtering. Basic etching rate is defined and sputtering models commonly used in calculations of sputtering yield have been reviewed. Simplified collisional model and Mathsunami equation are also applied to sputtering yields of the aluminium targets bombarded by argon ions.