화학공학소재연구정보센터
Journal of Crystal Growth, Vol.223, No.4, 494-502, 2001
Chemical composition of InxGa1-xAs epilayers grown simultaneously on differently oriented GaAs substrates
We investigate the In-composition of InxGa1-xAs ternary layers epitaxially grown by molecular beam epitaxy. The epilayers of different indium content (mole fraction 0.2