화학공학소재연구정보센터
Journal of Crystal Growth, Vol.225, No.2-4, 426-430, 2001
MOVPE of GaSb, (AlGa)Sb and (AlGa)(AsSb) in a multiwafer planetary reactor
Trimethylaluminum, tritertiarybutylaluminum (TTBA1) and dimethylethylamine alane (DMEAA) are compared as aluminum precursors for the growth of (AlGa)Sb and (AlGa)(AsSb) in an industrial size multiwafer planetary MOVPE reactor. The thermal activation behavior of the aluminum precursors is shown to be a critical factor as the growth is in the kinetically controlled regime. Both the efficiencies of TTBA1 and DM EAA are shown to depend on the V/III-ratio which is attributed to prereactions with trimethylantimony. Oxygen and carbon concentrations are reported for various compositions of (AlGa)Sb. Compared to TTBAI, the use of DMEAA results in an oxygen level in (Al0.19Ga0.81)Sb which is reduced by approximately one order of magnitude.