BiFeO3 (BFO) thin films were grown by chemical solution deposition on SrTiO3 (100) substrate. LaNiO3 thin films were used as the bottom electrode. X-ray diffraction pattern indicated that the samples exhibited highly (10 0) oriented. Scanning electron microscopy showed that the 13170 thin film possessed a dense microstructure and grains in BiFeO3 thin films were columnar. The remnant polarization of BFO thin films was 0.86 mu C/cm(2) when 375 kV/cm electric field was applied at 80 K. The conductivities of the samples at room temperature and 80 K. were smaller than 10(-12) Omega(-1) cm(-1). At 80 K, the permittivity of the BFO thin films decreased from 76 to 62 linearly with the frequency increasing from 1 kHz to 1 MHz. The dielectric loss was about 0.05 when the frequency was in the range of 1000-100 kHz, and was lower than 0.2 when the frequency was lower than 1 MHz. The pyroelectric coefficient at room temperature was 1.47 nC/(cm(2) K). (c) 2005 Elsevier B.V. All rights reserved.