TiO2-CoO binary compositional spread thin films were grown on a LaSrA1O(4)(0 0 1) (LASO) single crystal substrate at temperatures gradient from 550 to 750 degreesC. The ambient was fixed at an oxygen pressure between 5 x 10(-5) and 5 x 10(-7) Torr during the deposition. Scanning superconducting quantum interference device microscope was used as a high throughput screening of magnetic properties in the combinatorial libraries. X-ray diffraction (XRD) was used as structural characterization. From the XRD measurements, c-axis oriented anatase peaks were observed up to Co contents around 50%. Around this Co content, CoTiO3 peaks have maximum intensity and CoO peak appeared at higher Co content. The film magnetization was increasing with decreasing of oxygen pressure at the deposition. The region, in which magnetic domain structure was observed, agrees well with film conductive region. (C) 2003 Elsevier B.V. All rights reserved.