We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M0.01Y1.99O3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.(C) 2003 Elsevier B.V. All rights reserved.