Diffuse reflectance or optical scattering in thin films and multilayers can pose serious limiting factors to their desired or ultimate performances. Besides, such studies provide valuable information related to the buried microstructures and interfaces. Synchrotron radiation is the most appropriate source to record wavelength dependent polarized light scattering in thin films and multilayers. In the present experiment several gadolinia, silica thin films and multilayers were studied for their light scattering using the white light synchrotron beam. Various thin film layer geometries were selected to probe the results due to different types and combinations of interfaces. Due to phase coherent delay in certain optical non-wedged component used in the experimental setup very interesting spectral interference were noticed as the modulations in the diffuse reflectance signal. Appropriate modeling approach utilizing Gaussian function de-convolution technique is used to compute the pulse delay between the back reflected and forward propagating scattering signals that lead to such spectral interference. Alternatively inverse fast Fourier transform (IFFT) and analytical techniques were adopted to determine the group delays. The diffuse reflectance spectra were finally compared with their specular counter part and a shift both in the wavelength and phase were noticed. This may be explained on the basis of thin film roughness factors, different polarizations and incident geometries used in the measurements. However, all most all the spectral scattering signals exhibited the features resembling their specular reflection characteristic. (c) 2006 Elsevier B.V. All rights reserved.