Depth profile analysis (argon ion etching/X-ray photoelectron spectroscopy) was conducted on a series of Fe-16Cr-16Ni-2Mn-1Mo-2Si austenitic stainless steel samples oxidized at 973 and 1073 K with exposure times of 25, 100, 193 436 and 700 h. Surface and near surface rearrangement following oxidation resulted in a region of high Cr concentration on all oxidized samples. Temperature and time dependence to O-2 penetration depth was observed. In general, O-2 penetration depth was found to increase with increasing exposure up to 436 It. No increase in depth was observed between 436 and 700 h exposure time. Published by Elsevier B.V.