A layer of silver was deposited onto the surface of glass substrates, coated with AZO (Al-doped ZnO), to form Ag/AZO film structures, using ebeam evaporation techniques. The electrical and optical properties of AZO, Ag and Ag/AZO film structures were studied. The deposition of Ag layer on the surface of AZO films resulted in lowering the effective electrical resistivity with a slight reduction of their optical transmittance. Ag (11 nm)/AZO (25 nm) film structure, with an accuracy of +/- 0.5 nm for the thickness shows a sheet resistance as low as 5.6 +/- 0.5 Omega/sq and a transmittance of about 66 +/- 2%. A coating consisting of AZO (25 nm)/Ag (11 nmo/AZO (25 nm) trilayer structure, exhibits a resistance of 7.7 +/- 0.5 Omega/sq and a high transmittance of 85 2%. The coatings have satisfactory properties of low resistance, high transmittance and highest figure of merit for application in optoelectronics devices including flat displays, thin films transistors and solar cells as transparent conductive electrodes. (c) 2006 Elsevier B.V. All rights reserved.