Monolithic resonant-tunneling-diode (RTD) relaxation oscillators are fabricated. The highest repetition rate of this pulse generator is 6.7 GHz with a pulse width of approximately 60 ps. Oscillators with an RTD connected to an off-chip transmission line have been operated at a rate as low as 34 MHz while maintaining a similar pulse width. Characterization aided with simulations provides a better understanding of the RTD relaxation oscillator and the effects of the RTD characteristics on the performance of the oscillator.