The free-form net shape laser synthesis of nanostructured ceramics from liquid precursors enables a residual stress-free production of high temperature resistant ceramic units and components for the use in microsystem engineering. Due to the use of molecular compounded liquid, ceramic precursors the resulting ceramic components show outstanding properties, for example high purity and a nanostructured material design. The use of pulsed lasers enables a defined input of energy required to pyrolyse the precursor material into a crystalline ceramic, so the active volume can be reduced significantly compared to other processes, for example pyrolysis by furnace. In this paper several methods for a further minimization of the active volume are presented. The investigations determined different factors affecting the process. Realizing selective experiments allows a determination of their influencing level and the definition of a working area to produce three-dimensional components with high aspect ratio. By several studies, e.g., scanning electron microscopy, transmission electron microscopy as well as X-ray diffraction analysis, the atomic structure and composition of the created components were analyzed and valued, so the different reaction processes can be described extensively. (c) 2007 Elsevier B.V. All rights reserved.