Laser induced backside wet etching combined with the diffractive gray tone phase mask has been used for the fabrication of a micro-lens array with a single lens diameter of I mm and a micro-prism in quartz. The micro-lens array was tested as beam homogenizer for high power XeCl excimer laser yielding a clear improvement in the quality of the laser beam. The optimum fluence range for fabrication of micro-lenses by laser induced backside wet etching using 1.4 M pyrene in THF solution and 308 nm irradiation wavelength is 1-1.6 J/cm(2). The etching mechanisms of LIBWE are based on a combination of pressure and temperature jumps at quartz-liquid interface. (c) 2007 Elsevier B.V. All rights reserved.