에틸, 프로필 및 부틸 알코올의 플라즈마 중합

서은덕; 강영립

Polymer(Korea), Vol.22, No.3, 485-493, May, 1998

Export Citation

에틸, 프로필 및 부틸 알코올의 플라즈마 중합

Plasma Polymerization of Ethyl, n-Propyl and n-Butyl Alcohol

서은덕, 강영립

초록

수산기, 에스테르, 카보닐, 에테르 등의 기능기를 갖는 플라즈마중합 박막을 얻기 위해서 산 소에 의한 poison효과 때문에 플라즈마 중합이 어려운 에틸, 프로필 및 부틸알코올을 RF방전출력 25W, 방전압력 100, 140, 200mTorr의 조건에서 플라즈마 중합하고 이들 세가지 알코올-플라즈마 중합 박막의 구조와 구성성분을 IR 및 ESCA 스펙트럼을 분석하여 조사하였다. 생성된 박막은 -C-O-, -C=O, 및 -O-C=O 등과 같은 산소화합물을 포함하는 탄화수소로 구성되어 있었으며, 박막 내에 포함된 산소는 10-15% 정토였고. 반응조건에 따른 산소의 함량은 큰 차이가 없었으나 박막의 석출속도는 에너지 상태뿐만 아니라 단량체의 산소/탄소 함량비율에도 의존하였다.

In order to prepare thin films which have oxygen-containing functional groups, plasma polymerization of ethyl, n-propyl, and n-butyl alcohol was carried out at RF discharge power of 25 W and pressures of 100, 140, and 200 mTorr in spite of a poisoning effect due to oxygen atom in a1coho1. It was observed that the thin films had various kinds of oxygen-containing groups such as -C-O-.-C=O, and -O-C=O from the analysis of IR and ESCA spectra. The amounts of oxygen atom, which were in the range of 10-15%, were not sensitively affected by experimental conditions The deposition rate. however. depended not only on energy condition but alto on O/C ratio of the monomer.

Keywords:alcohol plasma polymerization;thin film;O/C ratio;deposition rate

[References]

Yasuda H, "Plasma Polymerization," Academic Press, Orlando, Flolida (1985)
Yasuda H, Hsu T, Surf. Sci., 76, 232 (1978)
Shen M, Bell AT, ACS Symposium Series 108, American Chem. Soc., Washington, D.C. (1979)
Yasuda H, Hirotsu T, J. Polym. Sci. A: Polym. Chem., 16, 743 (1978)
Seo ED, Yasuda H, Polym.(Korea), 14(4), 378 (1990)
Kuruvilla BA, Zambre M, Gosavi S, Gorwadkar S, Datta A, Gangal SA, Kulkarni SK, J. Polym. Sci. A: Polym. Chem., 32(12), 2275 (1994)
Seo ED, Kang YR, Kim SS, Polym.(Korea), 19(6), 743 (1995)
Masuoka T, Yasuda H, J. Polym. Sci. A: Polym. Chem., 20, 2633 (1982)
Schonhorn H, Hansen RH, J. Appl. Polym. Sci., 11, 1461 (1967)
Brady JE, "Ceneral Chemistry Principle and Structure," 5th Ed., John Wiley & Sons, Inc. (1990)
Brady JE, "Lange's Handbook of Chemistry," 14th Ed., McGraw-Hill Inc. (1992)

[Referenced By]

[1] Yasuda H, "Plasma Polymerization," Academic Press, Orlando, Flolida (1985)

[2] Yasuda H, Hsu T, Surf. Sci., 76, 232 (1978)

[3] Shen M, Bell AT, ACS Symposium Series 108, American Chem. Soc., Washington, D.C. (1979)

[4] Yasuda H, Hirotsu T, J. Polym. Sci. A: Polym. Chem., 16, 743 (1978)

[5] Seo ED, Yasuda H, Polym.(Korea), 14(4), 378 (1990)

[6] Kuruvilla BA, Zambre M, Gosavi S, Gorwadkar S, Datta A, Gangal SA, Kulkarni SK, J. Polym. Sci. A: Polym. Chem., 32(12), 2275 (1994)

[7] Seo ED, Kang YR, Kim SS, Polym.(Korea), 19(6), 743 (1995)

[8] Masuoka T, Yasuda H, J. Polym. Sci. A: Polym. Chem., 20, 2633 (1982)

[9] Schonhorn H, Hansen RH, J. Appl. Polym. Sci., 11, 1461 (1967)

[10] Brady JE, "Ceneral Chemistry Principle and Structure," 5th Ed., John Wiley & Sons, Inc. (1990)

[11] Brady JE, "Lange's Handbook of Chemistry," 14th Ed., McGraw-Hill Inc. (1992)