| 초록 |
We developed two kinds of the microchip for application to electrophoresis based on both glass and quartz employing MEMS fabrications. The poly-Si layer deposited onto the bonding interface apart from channel regions can play a role as the optical slit cutting off the stray light in order to concentrate the UV ray, from which it is possible to improve the signal-to-noise (S/N) ratio of the detection. In the glass chip, the deposited poly-Si layer had an important function of the etch mask and provided the bonding surface properly enabling the anodic bonding. The glass wafer results in the higher surface roughness of the channel wall, which affects on the microflow behavior of sample solutions. To solve this problem, we prepared the mixed etchant consisting HF and NH4F solutions. Both the shape and the dimension of each channel were observed, and the electroosmotic flow velocities were measured as 0.5 for quartz and 0.36 mm/s for glass channel. Applying the optical slit with poly-Si layer provides that the S/N ratio is increased as ca. 2 times for quartz chip and ca. 3 times for glass chip. The maximum UV absorbance is also enhanced. |
