검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of ZnO on MoS2 and WSe2 Walter TN, Lee S, Zhang XT, Chubarov M, Redwing JM, Jackson TN, Mohney SE Applied Surface Science, 480, 43, 2019 |
| 2 |
Effect of substrate on the growth and properties of thin 3R NbS2 films grown by chemical vapor deposition Kozhakhmetov A, Choudhury TH, Al Balushi ZY, Chubarov M, Redwing JM Journal of Crystal Growth, 486, 137, 2018 |
| 3 |
HVPE of aluminum nitride, film evaluation and multiscale modeling of the growth process Pons M, Su J, Chubarov M, Boichot R, Mercier F, Blanquet E, Giusti G, Pique D Journal of Crystal Growth, 468, 235, 2017 |
| 4 |
Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD Chubarov M, Mercier F, Lay S, Charlot F, Crisci A, Coindeau S, Encinas T, Ferro G, Reboud R, Boichot R Thin Solid Films, 623, 65, 2017 |
| 5 |
Stoichiometric, epitaxial ZrB2 thin films with low oxygen-content deposited by magnetron sputtering from a compound target: Effects of deposition temperature and sputtering power Tengdelius L, Greczynski G, Chubarov M, Lu J, Forsberg U, Hultman L, Janzen E, Hogberg H Journal of Crystal Growth, 430, 55, 2015 |
| 6 |
On the effect of water and oxygen in chemical vapor deposition of boron nitride Pedersen H, Chubarov M, Hogberg H, Jensen J, Henry A Thin Solid Films, 520(18), 5889, 2012 |