검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Effects of injected ion energy on silicon carbide film formation by low-energy SiCH3+ beam irradiation Yoshimura S, Sugimoto S, Takeuchi T, Murai K, Kiuchi M Thin Solid Films, 685, 408, 2019 |
| 2 |
Influence of processing gases on the properties of cold atmospheric plasma SiOxCy coatings Hamze H, Jimenez M, Deresmes D, Beaurain A, Nuns N, Traisnel M Applied Surface Science, 315, 531, 2014 |
| 3 |
Comparative studies of (0001) 4H-SiC layers grown with either Silane or HexaMethylDiSilane Propane precursor systems. Sartel C, Balloud C, Souliere V, Juillaguet S, Dazord J, Monteil Y, Camassel J, Rushworth S Materials Science Forum, 457-460, 217, 2004 |
| 4 |
Potential of HMDS/C3H8 precursor system for the growth of state of the art heteroepitaxial 3C-SiC layers on Si(100) Ferro G, Camassel J, Juillaguet S, Balloud C, Polychroniadis EK, Stoimenos Y, Seigle-Ferrand P, Dazord J, Monteil Y, Rushworth SA, Smith LM Materials Science Forum, 457-460, 281, 2004 |
| 5 |
Epitaxial growth of 4H-SiC with hexamethyldisilane HMDS Sartel C, Souliere V, Dazord J, Monteil Y, El-Harrouni I, Bluet JM, Guillot G Materials Science Forum, 389-3, 263, 2002 |
| 6 |
Donor densities and donor energy levels in 3C-SiC determined by a new method based on Hall-effect measurements Matsuura H, Masuda Y, Chen Y, Nishino S Materials Science Forum, 353-356, 495, 2001 |
| 7 |
Electrical properties of 3C-SiC grown on Si by CVD method using Si-2(CH3)(6) Masuda Y, Chen Y, Matsuura H, Harima H, Nishino S Materials Science Forum, 338-3, 711, 2000 |
| 8 |
Low-temperature epitaxial growth of cubic SiC thin films on Si(111) using supersonic molecular jet of single source precursors Boo JH, Ustin SA, Ho W Thin Solid Films, 343-344, 650, 1999 |
| 9 |
Reactivity of alkylsilanes and alkylcarbosilanes in atomic hydrogen-induced chemical vapor deposition Wrobel AM, Walkiewicz-Pietrzykowska A, Stasiak M, Aoki T, Hatanaka Y, Szumilewicz J Journal of the Electrochemical Society, 145(3), 1060, 1998 |
| 10 |
Seeded pulsed supersonic molecular beam growth of silicon carbide thin films Jamison KD, Kempel ML, Ballarotto VW, Kordesch ME Journal of Vacuum Science & Technology A, 16(3), 1327, 1998 |