검색결과 : 2건
No. | Article |
---|---|
1 |
Characterization of Sidewall Defects in Selective Epitaxial-Growth of Silicon Bashir R, Neudeck GW, Haw Y, Kvam EP, Denton JP Journal of Vacuum Science & Technology B, 13(3), 923, 1995 |
2 |
Characterization and Modeling of Sidewall Defects in Selective Epitaxial-Growth of Silicon Bashir R, Neudeck GW, Haw Y, Kvam EP Journal of Vacuum Science & Technology B, 13(3), 928, 1995 |