검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of Deposition and Ion-Scattering on Profile Control in Submicron Oxide Etch Shan H, Srinivasan BK, Jillie DW, Multani JS, Lo WJ Journal of the Electrochemical Society, 141(10), 2904, 1994 |
| 2 |
Effects of Deposition and Ion-Scattering on Profile Control in Submicron Oxide Etch (Vol 141, Pg 2904, 1994) Shan H, Srinivasan BK, Jillie DW, Multani JS, Lo WJ Journal of the Electrochemical Society, 141(11), 3290, 1994 |