검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Etching of polysilicon in inductively coupled Cl-2 and HBr discharges. I. Experimental characterization of polysilicon profiles Mahorowala AP, Sawin HH, Jones R, Labun AH Journal of Vacuum Science & Technology B, 20(3), 1055, 2002 |
| 2 |
Mechanistic feature-scale profile simulation of SiO2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysis Labun AH, Moffat HK, Cale TS Journal of Vacuum Science & Technology B, 18(1), 267, 2000 |
| 3 |
Topography simulation for the virtual wafer fab Cale TS, Merchant TP, Borucki LJ, Labun AH Thin Solid Films, 365(2), 152, 2000 |
| 4 |
Substrate Bias Effects in High-Aspect-Ratio SiO2 Contact Etching Using an Inductively-Coupled Plasma Reactor Westerheim AC, Labun AH, Dubash JH, Arnold JC, Sawin HH, Yuwang V Journal of Vacuum Science & Technology A, 13(3), 853, 1995 |
| 5 |
Profile Simulation of Electron-Cyclotron-Resonance Planarization of an Interlevel Dielectric Labun AH Journal of Vacuum Science & Technology B, 12(6), 3138, 1994 |