검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Molecular dynamics simulations of CF3 etching of SiC Gou F, Zen LT, Meng CL Thin Solid Films, 516(8), 1832, 2008 |
| 2 |
Hydrocarbon film growth by energetic CH3 molecule impact on SiC (001) surface Gou F, Meng CL, Zhouling ZT, Qian Q Applied Surface Science, 253(20), 8517, 2007 |
| 3 |
Atomic simulation of SiC etching by energetic SiF3 Gou F, Meng CL, Chen LZ, Qian Q Journal of Vacuum Science & Technology A, 25(4), 680, 2007 |