검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Kinetic Modeling of Silane Surface-Reactions Zuo R, Narusawa U, Tangborn A, Nowak W Journal of the Electrochemical Society, 142(5), 1625, 1995 |
| 2 |
Si Deposition from Chlorosilanes .1. Deposition Modeling Narusawa U Journal of the Electrochemical Society, 141(8), 2072, 1994 |
| 3 |
Si Deposition from Chlorosilanes .2. Numerical-Analysis of Thermofluid Effects on Deposition Narusawa U Journal of the Electrochemical Society, 141(8), 2078, 1994 |