화학공학소재연구정보센터

Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A, Vol.12, No.5 Entire volume, number list
ISSN: 0734-2101 (Print) 

In this Issue (65 articles)

2605 - 2616 Friction and Energy-Dissipation at the Atomic-Scale - A Review
Singer IL
2617 - 2624 Sensitivity of 2nd-Harmonic Generation to Space-Charge Effects at Si(111) Electrolyte and Si(111)/SiO2 Electrolyte Interfaces
Fischer PR, Daschbach JL, Gragson DE, Richmond GL
2625 - 2629 Si/SiO2 Interface Studies by Spectroscopic Immersion Ellipsometry and Atomic-Force Microscopy
Liu Q, Wall JF, Irene EA
2630 - 2640 In-Situ Pulsed Laser-Induced Thermal-Desorption Studies of the Silicon Chloride Surface-Layer During Silicon Etching in High-Density Plasmas of Cl2 and Cl2/O2 Mixtures
Cheng CC, Guinn KV, Donnelly VM, Herman IP
2641 - 2645 Surface-Roughness Formation in Si During Cs+ Ion-Bombardment
Matsuura Y, Shichi H, Mitsui Y
2646 - 2652 Investigation of Roughened Silicon Surfaces Using Fractal Analysis .1. 2-Dimensional Variation Method
Spanos L, Irene EA
2653 - 2661 Investigation of Roughened Silicon Surfaces Using Fractal Analysis .2. Chemical Etching, Rapid Thermal Chemical-Vapor-Deposition, and Thermal-Oxidation
Spanos L, Liu Q, Irene EA, Zettler T, Hornung B, Wortman JJ
2662 - 2671 Surface Modification of Fluoropolymers with Vacuum-Ultraviolet Irradiation
Matienzo LJ, Zimmerman JA, Egitto FD
2672 - 2679 Improved Determination of the Ultrathin Structural Parameters of Co/Pd Multilayered Film, and Its Magnetic and Magnetooptical Properties
Lee YP, Kim SK, Kang JS, Jeong JI, Hong JH, Koo YM, Shin HJ
2680 - 2684 Extraction of Inelastic Mean Free-Path Data from Elastic Electron Backscattering Data
Dwyer VM
2685 - 2691 Measurement and Modeling of Moisture Adsorption Properties of 316 Stainless-Steel Tubing Samples
Siefering KL, Whitlock WH
2692 - 2700 Low-Energy Ion-Induced Electron-Emission from Gas-Covered Surfaces
Smith PC, Hu B, Ruzic DN
2701 - 2704 X-Ray-Absorption Near-Edge Structures of Sulfur on Gas-Phase Polysulfide Treated InP Surfaces and at Sinx/InP Interfaces
Kwok RW, Huang LJ, Lau WM, Kasrai M, Feng X, Tan K, Ingrey S, Landheer D
2705 - 2710 X-Ray Photoelectron-Spectroscopy and Secondary-Ion Mass-Spectrometry Studies of Some Surface-Modified Hydrocarbon Films
Loh FC, Tan KL, Kang ET, Neoh KG, Pun MY
2711 - 2715 Development of a High-Resolution Quadrupole Mass-Spectrometer Capable of Detecting He-3 and He-4 in a Hydrogen Isotope Atmosphere
Hiroki S, Abe T, Murakami Y, Yanagishita K, Nakamura S
2716 - 2722 Main Features of Electron-Cyclotron-Resonance Ion-Source Vacuum-Systems
Pivarc J
2723 - 2727 Effect of Deposition Parameters on the Microstructure of Ion-Beam-Assisted Deposition Tin Films
Kheyrandish H, Colligon JS, Kim JK
2728 - 2732 Ion-Beam-Induced Chemical-Vapor-Deposition Procedure for the Preparation of Oxide Thin-Films .1. Preparation and Characterization of TiO2 Thin-Films
Leinen D, Espinos J, Fernanfdez A, Gonzalezelipe AR
2733 - 2738 Influence of Charge-Exchange on Ion-Neutral Arrival Rates in an Ion-Assisted Deposition System
Kim JK, Kheyrandish H, Colligon JS
2739 - 2744 New High-Power Fast Atom Beam Source
Shimokawa F, Kuwano H
2745 - 2753 Microprofile Simulations for Plasma-Etching with Surface Passivation
Hamaguchi S, Dalvie M
2754 - 2761 Deposition of Silicon Dioxide Films Using the Helicon Diffusion Reactor for Integrated-Optics Applications
Giroultmatlakowski G, Charles C, Durandet A, Boswell RW, Armand S, Persing HM, Perry AJ, Lloyd PD, Hyde SR, Bogsanyi D
2762 - 2766 Growth of Er-Doped Si Films by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition
Rogers JL, Varhue WJ, Adams E, Lavoie MA, Frenette RO
2767 - 2774 Comparison of Ar Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .1. Electron-Temperature and Plasma-Density
Junck KL, Getty WD
2775 - 2779 Spatially-Resolved Optical-Emission for Characterization of a Planar Radio-Frequency Inductively-Coupled Discharge
Beale DF, Wendt AE, Mahoney LJ
2780 - 2783 Investigation of the Energy-Transfer to the Substrate During Titanium Deposition in a Hollow-Cathode Arc
Steffen H, Kersten H, Wulff H
2784 - 2789 Molecular-Beam Epitaxy Cell Optimized for Organic-Compounds and Preparation of a Cu Phthalocyanine Thin-Film
Hattori S, Ishitani A, Kuroda H
2790 - 2794 Compact Metalorganic Molecular-Beam Epitaxy Growth System
Hamm RA, Ritter D, Temkin H
2795 - 2797 Electron-Gun for Producing a Low-Energy, High-Current, and Uniform Flux Electron-Beam
Lin JL, Yates JT
2798 - 2802 Fabrication of Cylindrical, Microcellular Foam-Filled Targets, Containing Aluminum Spheres, for Sphere Drag Experiments
Falconer JW, Nazarov W, Horsfield CJ, Sutton DW, Rothman SD, Freeman NJ
2803 - 2807 Processing and Characterization of Large-Grain Thin-Film CdTe
Nelson AJ, Hasoon F, Levi D
2808 - 2813 Characterization of Defect Geometries in Multilayer Optical Coatings
Tench RJ, Chow R, Kozlowski MR
2814 - 2819 Thermal-Desorption of Co and H2 from Degassed 304 and 347 Stainless-Steel
Rezaieserej S, Outlaw RA
2820 - 2824 Investigation About the Incorporation of Hydrogen into Amorphous-Carbon
Schelz S, Kania P, Frauenheim T, Stephan U, Oelhafen P
2825 - 2829 Buried Reconstruction Inhibition of Solid-Phase Epitaxy of Ge on Si(111)
Hellman O
2830 - 2833 End-Point Detection by Sputtered Neutral Mass-Spectrometry in Ion Milling of Prepatterned Semiconductor and High-T(C) Superconductor Films
Jaekel C, Barth R, Roskos HG, Kurz H
2834 - 2839 Low-Voltage and High-Speed Operating Electrostatic Wafer Chuck Using Sputtered Tantalum Oxide Membrane
Nakasuji M, Shimizu H, Kato T
2840 - 2845 Model of Lead Loss in Pb(Mgxnb1-X)Oz Ion-Beam Sputtered Thin-Films
Pignolet A, Roy RA, Doyle JP, Cuomo JJ
2846 - 2854 Mass and Energy-Resolved Detection of Ions and Neutral Sputtered Species Incident at the Substrate During Reactive Magnetron Sputtering of Ti in Mixed Ar+n2 Mixtures
Petrov I, Myers A, Greene JE, Abelson JR
2855 - 2858 Epitaxial-Growth and Characterization of Ni Films Grown on MgO(001) by Biased Direct-Current Sputter-Deposition
Qiu H, Nakai H, Hashimoto M, Safrahn G, Adamik M, Barna PB, Yagi E
2859 - 2866 Characterization of Hydrogen and Oxygen-Atoms in Sin Films Produced by Plasma-Enhanced Reactive Sputtering
Sugimoto I, Yanagisawa K, Kuwano H, Nakano S, Tago A
2867 - 2872 Hybrid Modeling of Deposition Profiles in Magnetron Sputtering Systems
Stache J
2873 - 2878 Modeling of Deposition and Resputtering Rate Profiles in Planar Face-to-Face Sputtering Systems
Hamerich A, Wunderlich R, Muller J
2879 - 2886 Tribochemistry at Lubricated Interfaces
Novotny VJ, Pan XH, Bhatia CS
2887 - 2895 Studies on Thermionic Cathode Anodic Vacuum Arcs
Musa G, Mausbach M
2896 - 2902 Preventing Vacuum Leaks in the Continuous Electron-Beam Accelerator Facility Cavity Pair Bellows
Henkel DP, Doolittle LR
2903 - 2910 Clean Ultrahigh-Vacuum System with Single-Structure Diffusion Pumps
Gay TJ, Brand JA, Fritts MC, Furst JE, Khakoo MA, Mell ER, Sieger MT, Wijayaratna WM
2911 - 2916 Influence of the Filament Potential Wave-Form on the Sensitivity of Glass-Envelope Bayard-Alpert Gauges
Abbott PJ, Looney P
2917 - 2921 Investigation of Synchrotron-Radiation-Induced Photodesorption in Cryosorbing Quasiclosed Geometry
Anashin VV, Malyshev OB, Osipov VN, Maslennikov IL, Turner WC
2922 - 2924 In-Situ Scanning Electron-Microscopy Observation of Hillock and Whisker Growth on Al-Ta Alloy-Films for Interconnections of Thin-Films Transistor Liquid-Crystal Displays
Imura E, Ohnishi T, Yoshikawa K, Itayama K
2925 - 2930 Filling of Micron-Sized Contact Holes with Copper by Energetic Cluster-Impact
Haberland H, Mall M, Moseler M, Qian Y, Reiners T, Thurner Y
2931 - 2932 Observation of Cryopump Fluorescence During Operation of Electron-Beam Evaporator
Erck RA
2933 - 2935 Rarefied-Gas Flow-Through a Long Tube at Any Pressure Ratio
Sharipov FM, Seleznev VD
2936 - 2937 Influence of the Ratio of the Electron Temperatures at the Electrodes on the Current Oscillations in a Radiofrequency Plasma Reactor
Deutsch R, Erz U, Pohle M, Rauchle E, Schwarz J
2938 - 2939 Noninvasive Infrared-Based Measurement of the Temperature of GaAs Semiconductors Crystals
Malam SC, Pell T, Nix RM
2940 - 2942 Simple Pulsed-Plasma-Beam Gun for Ultrahigh-Vacuum Applications
Yamada C, Kimura T
2943 - 2945 Increased Precision in Strain-Measurement of Diamond by Microraman Spectroscopy
Alexander WB, Holloway PH, Simmons J, Ochoa R
2946 - 2947 Glass and Polymer-Based Dosing System for the Introduction of Reactive Gases into Ultrahigh-Vacuum
Apen E, Wentz R, Pompei F, Gland JL
2949 - 2955 Protein-Interaction with Surfaces - Separation Distance-Dependent Interaction Energies
Lee SJ, Park K
2956 - 2961 Effect of Surface Microphase-Separated Structure on Interaction Between Biological Components and Multiphase Polymer Surface
Takahara A, Korehisa K, Ge SR, Kajiyama T
2962 - 2965 Inorganic Pathways for Biosynthesis - A Molecular-Orbital Modeling Approach
Hench LL, West JK
2966 - 2970 Examination of Wax on Surface of Extruded Pellethane by Scanning Electron-Microscopy Attenuated Total Reflection-Infrared and X-Ray Photoelectron-Spectroscopy and Its Importance in Blood Compatibility
Sawyer A, Bandekar J, Li H
2971 - 2974 Evaluation of Molecular Arrangement in Fatty-Acid Monolayers with Transmission Electron and Atomic-Force Microscope
Oishi Y, Hirose F, Kuri T, Kajiyama T
2975 - 2980 Molecular Films from the Polymerizable Lipid Ethyl Morpholine Pentacosadiynoic Amide
Sullivan B, Ribi HO, Tillmann RW, Hofmann UG, Gaug HE
2981 - 2987 Control of Purple Membrane Adsorption to a Glass-Surface Using Self-Assembled Monolayers
Brizzolara RA, Beard BC