Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B, Vol.23, No.2 Entire volume, number list

ISSN: 1071-1023 (Print)

In this Issue (95 articles)

L1 - L3	Fabrication of 5 nm gap pillar electrodes by electron-beam Pt deposition Gazzadi GC, Frabboni S
339 - 343	Fabrication of a nanosized current-driven spin valve device using proximity correction in electron-beam lithography Yi HJ, Nguyen THY, Chang JY, Shin KH
344 - 348	Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresists McDonough LA, Chikan V, Kim ZH, Leone SR, Hinsberg WD
349 - 353	Diffusion of dopants in highly (similar to 10(20) CM-3) n- and p-doped GaSb-based materials Dier O, Grau M, Lauer C, Lin C, Amann MC
354 - 358	Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques Harant AW, Whipple SG, Douglas K, Bowman CN
359 - 369	Fabrication and characterization of p-type silicon field-emitter arrays for lithography Teepen TF, van Veen AHV, van't Spijker H, Steenbrink SWHK, van Zuuk A, Heerkens CTH, Wieland MJ, van Druten NJ, Kruit P
370 - 374	Performance improvement of diamondlike carbon membrane masks for electron projection lithography Amemiya I, Yamashita H
375 - 379	Three-dimensional multilayered microstructure fabricated by imprint lithography Ooe H, Morimatsu M, Yoshikawa Y, Kawata H, Hirai Y
380 - 388	Shot noise power spectrum of planar field emitters Rangaswamy K, Cahay M, Jensen KL
389 - 394	Reduction of plasma-induced damage in SiO2 films during pulse-time-modulated plasma irradiation Ishikawa Y, Okigawa M, Samukawa S, Yamasaki S
395 - 405	Effect of plasma interactions with low-kappa films as a function of porosity, plasma, chemistry, and temperature Worsley MA, Bent SF, Gates SM, Fuller NCM, Volksen W, Steen M, Dalton T
406 - 416	Anion variations at semiconductor interfaces: ZnSe(100)/GaAs(100) superlattices Farrell HH, LaViolette RA
417 - 424	Edge effects characterization of phase shift mask Chua GS, Tay CJ, Quan CH, Lin QY
425 - 432	Effect of sidewall properties on the bottom microtrench during SiO2 etching in a CF4 plasma Min JH, Lee GR, Lee JK, Moon SH, Kim CK
433 - 436	Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy Yiang KY, Yoo WJ, Krishnamoorthy A
437 - 442	In situ fabrication of metal gate/high-kappa dielectric gate stacks using a potential lower cost front-end process for the sub-90 nm CMOS technology node Damjanovic D, Singh R, Poole KF
443 - 448	Surface morphology of epitaxial LiF(110) and CaF2(110) layers Sugawara A, Mae K
449 - 457	Effects of B content on microstructure and mechanical properties of nanocomposite-Ti-B-x-N-y thin films Lu YH, Sit P, Hung TF, Chen HD, Zhou ZF, Li KY, Shen YG
458 - 462	Synthesis of multiwalled carbon nanotubes using C14H10O7W catalyst Huh Y, Lee JY, Choi SK, Lee CJ
463 - 467	Copper diffusion barrier properties of CVD boron carbo-nitride Engbrecht ER, Sun YM, Junker KH, White JM, Ekerdt JG
468 - 474	Approach to interface roughness of silicide thin films by micro-Raman imaging Zhao FF, Sun WX, Feng YP, Zheng JZ, Shen ZX, Pang CH, Chan LH
475 - 479	Effects of Pd activation on the self annealing Of electroless copper deposition using Co(II)-ethylenediamine as a reducing agent Lee CH, Kim JJ
480 - 485	Mechanism of simultaneous formation of refractory-metal free C40 and C49TiSi(2) induced by Q-switched Nd : Yttrium-aluminum-garnet laser irradiation Tan SC, See A, Yu T, Shen ZX, Lin J
486 - 494	Effects of nickel and titanium thickness on nickel/titanium ohmic contacts to n-type silicon carbide Park JH, Holloway PH
495 - 498	Fermi level pinning on Si0.83Ge0.17 surface by inductively coupled plasma treatment Kim IG, Choi KJ, Lee JL
499 - 506	Rutile films grown by molecular beam epitaxy on GaN and AlGaN/GaN Hansen PJ, Vaithyanathan V, Wu Y, Mates T, Heikman S, Mishra UK, York RA, Schlom DG, Speck JS
507 - 512	Nanoimprint and nanocontact technologies using hydrogen silsesquioxane Nakamatsu K, Watanabe K, Tone K, Namatsu H, Matsui S
513 - 518	Fabrication of polysilicon thin-film transistors using nickel/copper double-layer-induced lateral crystallization Chen CC, Yang BC, Lee SC
519 - 524	Investigation of a nanocrystalline silicon phase embedded in SiOx thin films grown by pulsed laser deposition Fazio E, Barletta E, Barreca F, Neri F, Trusso S
525 - 529	Influence of electric field intensity on the copper catalyst-mediated crystallization of amorphous silicon Kim YB, Kim CH, Kim HC, Kim YW, Jeon HP, Choi DK
530 - 533	Ferromagnetic properties of (Ga,Mn)N nanowires grown by a chemical vapor deposition method Baik JM, Lee JL
534 - 539	Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks Kubota T, Baba T, Kawashima H, Uraoka Y, Fuyuki T, Yamashita I, Samukawa S
540 - 546	Process method to suppress the effect of phase errors in alternating phase shift masks Singh N, Roy MM, Mehta SS, Adeyeye AO
547 - 553	Evaluation of the effectiveness of H-2 plasmas in removing boron from Si after etching of HfO2 films in BCl3 plasmas Wang C, Donnelly VM
554 - 558	Combined in situ and ex situ analysis of hydrogen radical and thermal removal of native oxides from (001) GaAs Eyink KG, Grazulis L
559 - 562	Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-bearn patterned aluminum Peng CY, Liu CY, Liu NW, Wang HH, Datta A, Wang YL
563 - 565	Carbon nanotube field emitter manufactured by anodic-alumina template and Ni-CNT composite plating Kang H, Lee S, Lee H
566 - 569	Dielectric properties enhancement of ZrO2 thin films induced by substrate biasing Huang AP, Chu PK, Yan H, Zhu MK
570 - 574	Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition Watanabe K, Hoshino T, Kanda K, Haruyama Y, Kaito T, Matsui S
575 - 584	Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography Keil M, Beck M, Ling TGI, Graczyk M, Montelius L, Heidari B
585 - 587	Gas-assisted focused ion beam etching characteristics of niobium Fu XL, Li PG, Jin AZ, Zhang HY, Yang HF, Tang WH
588 - 593	Microstructure and mechanical properties of superhard Ti-B-C-N films deposited by dc unbalanced magnetron sputtering. Park IW, Kim KH, Kunrath AO, Zhong D, Moore JJ, Voevodin AA, Levashov EA
594 - 598	Electronic defect states at annealed metal/4H-SiC interfaces Tumakha S, Goss SH, Brillson LJ, Okojie RS
599 - 611	Influence of scaling effects on designing for power efficiency of a micropreconcentrator Cook KA, Sastry AM
612 - 617	Three-dimensional time-resolved analysis for the discharge of plasma display panel using the scanned-point detecting system Choi HY, Lee SH, Lee SG, Seo JH
620 - 620	Papers from the 17th International Vacuum Nanoelectronics Conference -11-16 July 2004, Cambridge, Massachusetts - Preface Akinwande AI, Kymissis I, Hong CY, Chen LY
621 - 631	Time dependent models of field-assisted photoemission Jensen KL, Feldman DW, O'Shea PG
632 - 635	Effect of aspect ratio and anode location on the field emission properties of a single tip based emitter Smith RC, Carey JD, Forrest RD, Silva SRP
636 - 639	Space-charge effects of electrons and ions on the steady states of field-emission-limited diodes Lin MC
640 - 644	Electron optics and electrical studies of a single Spindt-type field emitter Desieres Y, Nicolas P, Sermet F, Geffraye F, Gidon S
645 - 648	Numerical study of the electrostatic field gradients present in various planar emitter field emission configurations relevant to experimental research Gonzalez-Berrios A, Piazza F, Morell G
649 - 656	Ring-shaped images as a result of nonuniform field emission from capped carbon nanotubes Filip LD, Nicolaescu D, Tanemura M, Kanemaru S, Itoh J
657 - 664	Field electron emission from two-dimensional electron gas Filip V, Nicolaescu D, Wong H, Nagao M, Chu PL
665 - 670	Field emission under extreme conditions from carbon nanopearls in a foam-like arrangement Levesque A, Vincent P, Binh VT, Guillot D, Brookes MD
671 - 675	Scanning anode field emission microscopy analysis for studies of planar cathodes Semet V, Mouton R, Binh VT
676 - 679	Field emission from teepee-shaped carbon nanotube bundles Busta H, Tolt Z, Montgomery J, Feinerman A
680 - 681	Pulsed field emitted current from different commercial samples in the purpose of a free electron laser application Ganter R, Li K, Dehler M, Gobrecht J, Rivkin L, Wrulich A
682 - 686	Characterization of an advanced high-efficiency electron emission device Negishi N, Nakada T, Sakemura K, Okuda Y, Satoh H, Watanabe A, Yoshikawa T, Ogasawara K, Koshida N
687 - 690	Energy distributions of field emission electrons from silicon emitters Shimawaki H, Suzuki Y, Sagae K, Neo Y, Mimura H
691 - 693	High current, high current density field emitter array cathodes Schwoebel PR, Spindt CA, Holland CE
694 - 697	Regeneration of gated carbon nanotube field emission Hsu DSY, Shaw JL
698 - 701	Influence of mechanical stress on electron field emission of multiwalled carbon nanotube-polymer composites Poa CHP, Smith RC, Silva SRP, Sun CQ
702 - 706	Stable and high emission current from carbon nanotube paste with spin on glass Park JH, Moon JS, Han JH, Berdinsky AS, Yoo JB, Park CY, Nam JW, Park J, Lee CG, Choe DH
707 - 717	Emission statistics for Si and HfC emitter arrays after residual gas exposure Nicolaescu D, Nagao M, Sato T, Filip V, Kanemaru S, Itoh J
718 - 722	Uniformity measurement of electron emission from carbon nanotubes using electron-beam resist Lee JH, Lee SH, Kim WS, Lee HJ, Heo JN, Jeong TW, Choi CH, Kim JM, Park JH, Ha JS, Lee HJ, Moon JW, Yoo MA, Nam JW, Cho SH, Yoon TI, Kim BS, Choe DH
723 - 730	Noise and emission characteristics of NbC/Nb field emitters Charbonnier FM, Southall LA, Mackie WA
731 - 734	Ion-beam morphological conditioning of carbon field emission cathode surfaces Hunt CE, Chakhovskoi AG, Wang Y
735 - 740	Observation of electron emission pattern from nanosplit emitter fabricated using beam assisted process Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M
741 - 744	Scanning tunneling microscopy observations of hafnium carbide thin films as a field emission material Sato T, Saida M, Horikawa K, Sasaki M, Nagao M, Kanemaru S, Matsukawa T, Itoh J, Yamamoto S
745 - 748	Low temperature burnable carbon nanotube paste component for carbon nanotube field emitter backlight unit Lee S, Im WB, Kang JH, Jeon DY
749 - 753	Screen printed carbon nanotube field emitter array for lighting source application Park JH, Son GH, Moon JS, Han JH, Berdinsky AS, Kuvshinov DG, Yoo JB, Park CY, Nam JW, Park JW, Lee CG, Choe DH
754 - 758	Selective growth of carbon nanotubes on silicon protrusions Sato H, Hata K, Miyake H, Hiramatsu K, Saito Y
759 - 761	Effect of thermal annealing on emission characteristics of nanoelectron source fabricated using beam-assisted process Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M
762 - 764	Influence of gas atmosphere during laser surface treatment of CNT cathode Rochanachirapar W, Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M, Hosono A, Okuda S
765 - 768	Laser surface treatment of carbon nanotube cathodes for field emission displays with large diagonal size Rochanachirapar W, Murakami K, Yamasaki N, Abo S, Wakaya F, Takai M, Hosono A, Okuda S
769 - 771	Reduction of the work function on Mo(100) surface covered with ZrO2 Nakane H, Satoh S, Adachi H
772 - 775	Fabrication and field emission characteristics of high density carbon nanotube microarrays Chuang CC, Huang JH, Lee CC, Chang YY
776 - 780	High current field emission from carbon nanofiber films grown using electroplated Ni catalyst Park KH, Yim JH, Lee S, Koh KH
781 - 785	Investigation of a microtriode with a planar field emitter-extractor source fabricated by direct-write nanolithography using electron beam induced deposition Sellmair J, Edinger K, Koops HWP
786 - 792	Growth aspects of nanocrystalline diamond films and their effects on electron field emissions Subramanian K, Kang WP, Davidson JL, Hofmeister WH
793 - 799	Effects of deposition and synthesis parameters on size, density, structure, and field emission properties of Pd-catalyzed carbon nanotubes synthesized by thermal chemical vapor deposition Wei S, Kang WP, Hofmeister WH, Davidson JL, Wong YM, Huang JH
800 - 804	Edge-shaped diamond field emission arrays Takalkar RS, Davidson JL, Kang WP, Wisitsora-at A, Kerns DV
805 - 808	Effect of Ti interlayer on the growth of carbon nanotubes on Si by microwave-heated chemical vapor deposition Huang JH, Chen YS, Chuang CC, Wong YM, Kang WR
809 - 813	Electron field emission from carbon nanotubes on porous alumina Lysenkov D, Abbas H, Muller G, Engstler J, Budna KP, Schneider JJ
814 - 818	X-ray generation from large area carbon-based field emitters Busta H, Lesiak S, Zwicker B, Montgomery J, Wan Z, Feinerman A
819 - 823	Desorption/ionization mass spetrometry on array of silicon microtips Gorecka-Drzazga A, Dziuban J, Drzazga W, Kraj A, Silberring J
824 - 830	Composite-layered solid-state field controlled emitter for a better control of the cathode surface barrier Semet V, Binh VT, Zhang JP, Yang J, Khan MA, Tsu R
831 - 835	High intensity pulse x-ray generation by using graphite-nanocrater cold cathode Matsumoto T, Mimura H
836 - 839	Method and structure for local emission regulation and arc prevention in field emitter arrays Shaw JL, Hsu DSY
840 - 842	Smith-Purcell radiation using a single-tip field emitter Neo Y, Suzuki Y, Sagae K, Shimawaki H, Mimura H
843 - 848	Characterization of nano-size YVO4 : Eu and (Y, Gd)VO4 : Eu phosphom by low voltage cathodo- and photoluminescence Kang JH, Nazarov M, Bin Im W, Kim JY, Jeon DY
849 - 852	Field-emission based vacuum device for the generation of terahertz waves Lin MC, Huang KH, Lu PS, Lin PY, Jao RF
853 - 863	Polysilicon metal-insulator-semiconductor electron emitter Govyadinov A, Novet T, Pidwerbecki D, Ramamoorthi S, Smith J, Chen J, Otis C, Neiman D, Benning P
864 - 867	Fabrication of Si field emitter array in local vacuum package Noda D, Hatakeyama M, Kyogoku M, Ikushima K, Sawada K, Ishida M
868 - 873	Transistor characteristics of thermal chemical vapor deposition carbon nanotubes field emission triode Wong YM, Kang WP, Davidson JL, Hofmeister W, Wei S, Huang JH