압력순환흡착법과 다공성 매체 연소법을 이용한 전자산업 불화가스 저감 스크러버 개발

정종국; 이기용; 이상곤; 이은미; 모선희; 이대근; 김승곤; Jong Kook Chung; Ki Yong Lee; Sang Gon Lee; Eun Mi Lee; Sun Hee Mo; Dae Keun Lee; Seung Gon Kim

Clean Technology, Vol.23, No.2, 181-187, June, 2017

DOI10.7464/ksct.2017.23.2.181 Export Citation

압력순환흡착법과 다공성 매체 연소법을 이용한 전자산업 불화가스 저감 스크러버 개발

The Development of Scrubber for F-gas Reduction from Electronic Industry Using Pressure Swing Adsorption Method and Porous Media Combustion Method

정종국^†, 이기용, 이상곤, 이은미, 모선희, 이대근, 김승곤¹

글로벌스탠다드테크놀로지, 경기 화성시 동탄면 동탄산단 6길 15-13
¹한국에너지기술연구원, 대전광역시 유성구 가정로 152

Jong Kook Chung^†, Ki Yong Lee, Sang Gon Lee, Eun Mi Lee, Sun Hee Mo, Dae Keun Lee, and Seung Gon Kim¹

Global Standard Technology, 15-13, Dongtansandan 6-gil, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, Korea
¹Korea Institute of Energy Research, 152 Gajeong-ro, Yuseong-gu, Daejeon, Korea

E-mail:

초록

반도체 및 디스플레이 산업에서 배출되는 과불화합물은 연소, 열, 플라즈마, 촉매 등의 다양한 방법이 적용된 스크러버에 의해 분해 과정을 거친 후 배출되나, 운영 스크러버의 대부분이 과도한 에너지의 사용, 낮은 저감 효율을 보임으로써 이러한 단점의 극복이 요구된다. 압력순환흡착법과 다공성 매체 연소법의 두 가지 기술이 연계된 새로운 형태의 과불화합물 저감 스크러버를 개발하고 특성을 알아보았다. 분해 대상인 CF4의 흡착비와 손실계수는 흡착 컬럼의 입구와 출구에서 농도 측정을 통해 계산하였으며, 연소기의 입구와 출구의 유량과 농도 측정을 통해 처리 효율을 계산하였다. 기존 스크러버와의 에너지 사용량 및 처리효율 비교를 위하여 다양한 유량에 대한 성능 평가가 진행되었다. 1412 ppm, 204 LPM의 CF4가 유입된 흡착 컬럼에서의 흡착비는 1.65였으며, 유입되는 CF4의 손실 계수는 8.2%였다. 이때 연소기로 유입되는 CF4의 유량과 농도는 각각 91 LPM과 2335 ppm이었으며, CH4 19 LPM, O2 40 LPM을 사용한 연소 반응시 약 96%의 저감 효율을 나타내었다. 상용 스크러버와의 동일 운전 조건에서의 다공성 매체 연소에서의 CF4 저감 효율과 전체 에너지 사용 효율 비교시 각각 16%, 41% 이상의 저감 효율 상승과 에너지 절감 효과를 보였다.

The perfluorocompounds (PFCs) emitted from the semiconductor and display manufacture is treated by abatement systems which use various technologies, such as combustion, thermal, plasma, catalyst. However, it is required that the system should overcome their drawbacks with excess energy consumption and low removal efficiency. The new technology using combination of pressure swing adsorption and excess enthalpy combustion for the reduction of PFCs emissions were developed and analyzed its characteristics. PFCs concentration ratio and PFCs loss factor were calculated from measuring concentration of PFCs at the calculated by comparing concentration of PFCs at the combustor's inlet and outlet. There were performance evaluations with various gas flow for comparing energy consumption and removal efficiency with existing equipments. The concentration ratio and the loss factor of PFCs were 1.65, 8.2%, respectively, when the total gas flow of the pressure swing absorption (PSA) inlet was 204 liter per minute (LPM) and CF4 concentration was 1412 ppm. In comparison with existing system at constant condition, CF4 removal efficiency for a porous media combustion (PMC) showed the improvement more than 16% and the consumed energy was also reduced up to approximately 41%. Then, the total gas flow introduced into PMC and CF4 concentration were 91-LPM and 2335 ppm, respectively, and the destruction and removal efficiency of CF4 was about 96% at 19-LPM CH4, and 40-LPM O2.

Keywords:Perfluorocompounds;Pressure swing adsorption;Porous media combustion;Destruction and removal efficiency

[References]

Lee JY, Lee JB, Moon DM, Souk JH, Lee SY, Kim JS, Bull. Korean Chem. Soc., 28(8), 1383 (2007)
Park YK, “Waste Gas Treatment System for Semiconductor Process,” Environment Technology Development Business, Report the Ministry of Environment (2004).
Greenhouse Gas Inventory and Research Center, “ National Greenhouse Gas Inventory Report of Korea,” (2014).
Chung JK, Lee KY, Kim DH, “Device for Purifying Exhausted Gas from Chemical Vapor Deposition,” Korea Patent No. 10-1617691 (2016).
Han SH, Park HW, Kim TH, Park DW, Clean Technol., 17(3), 250 (2011)
Lee YC, Jeon JK, Clean Technol., 18(2), 216 (2012)
Jeong SH, Han JH, Lee SJ, Lee MJ, “Studies for Discomposing Characteristic of PFCs Fluid with the Plasma Torch,” 30th KOSCO Symposium, 141-146 (2008).
Ryu JY, Son YI, Jang SH, J. Korea Soc. Waste Manage., 32(1), 1 (2015)
Kim SG, Lee DK, Noh DS, Appl. Therm. Eng., 103, 1390 (2016)
Qin L, Han J, Wang G, Kim HJ, Kawaguchi I, “Highly Efficient Decomposition of CF4 Gases by Combustion,” Science Research, Conference on Environmental Pollution and Public Health, 126-130 (2010).
Chung JK, “Process Equipment Emission Control Technology,” 3th Forums on Cleanroom Contamination Control for Next Generation, Korea Air Cleaning Association (2016).
National Institute of Environmental Research, “Guideline for Measurement Method of Destruction and Removal Efficiency of Greenhouse Gas Abatement System Using at Semiconductor and Display Manufacturing,” (2015).
Lee DK, Kim SG, Noh DS, Ko CB, Guahk YT, “Energy-saving Combustion Apparatus for Incineration Disposal of Non-degradable Noxious Gases, and Operation Method Thereof,” PCT/KR2015/002964 (2015).

[1] Lee JY, Lee JB, Moon DM, Souk JH, Lee SY, Kim JS, Bull. Korean Chem. Soc., 28(8), 1383 (2007)

[2] Park YK, “Waste Gas Treatment System for Semiconductor Process,” Environment Technology Development Business, Report the Ministry of Environment (2004).

[3] Greenhouse Gas Inventory and Research Center, “ National Greenhouse Gas Inventory Report of Korea,” (2014).

[4] Chung JK, Lee KY, Kim DH, “Device for Purifying Exhausted Gas from Chemical Vapor Deposition,” Korea Patent No. 10-1617691 (2016).

[5] Han SH, Park HW, Kim TH, Park DW, Clean Technol., 17(3), 250 (2011)

[6] Lee YC, Jeon JK, Clean Technol., 18(2), 216 (2012)

[7] Jeong SH, Han JH, Lee SJ, Lee MJ, “Studies for Discomposing Characteristic of PFCs Fluid with the Plasma Torch,” 30th KOSCO Symposium, 141-146 (2008).

[8] Ryu JY, Son YI, Jang SH, J. Korea Soc. Waste Manage., 32(1), 1 (2015)

[9] Kim SG, Lee DK, Noh DS, Appl. Therm. Eng., 103, 1390 (2016)

[10] Qin L, Han J, Wang G, Kim HJ, Kawaguchi I, “Highly Efficient Decomposition of CF4 Gases by Combustion,” Science Research, Conference on Environmental Pollution and Public Health, 126-130 (2010).

[11] Chung JK, “Process Equipment Emission Control Technology,” 3th Forums on Cleanroom Contamination Control for Next Generation, Korea Air Cleaning Association (2016).

[12] National Institute of Environmental Research, “Guideline for Measurement Method of Destruction and Removal Efficiency of Greenhouse Gas Abatement System Using at Semiconductor and Display Manufacturing,” (2015).

[13] Lee DK, Kim SG, Noh DS, Ko CB, Guahk YT, “Energy-saving Combustion Apparatus for Incineration Disposal of Non-degradable Noxious Gases, and Operation Method Thereof,” PCT/KR2015/002964 (2015).