5101 - 5106 |
Laser ablation with short and ultrashort laser pulses: Basic mechanisms from molecular-dynamics simulations Lewis LJ, Perez D |
5107 - 5111 |
Molecular dynamics study of the role of material properties on nanoparticles formed by rapid expansion of a heated target Itina TE |
5112 - 5115 |
Modeling of fast phase transitions dynamics in metal target irradiated by pico- and femtosecond pulsed laser Mazhukin VI, Lobok MG, Chichkov B |
5116 - 5119 |
Molecular dynamics study of nanoparticle evolution in a background gas under laser ablation conditions Gouriet K, Zhigilei LV, Itina TE |
5120 - 5124 |
Phase transitions in femtosecond laser ablation Povarnitsyn ME, Khishchenko KV, Levashov PR |
5125 - 5129 |
Near field localization mediated by a single gold nanoparticle embedded in transparent matrix: Application for surface modification Nedyalkov NN, Imamova SE, Atanasov PA, Obara M |
5130 - 5137 |
Surface plasmon scattering on polymer-bimetal layer covered fused silica gratings generated by laser induced backside wet etching Tohati H, Sipos A, Szekeres G, Mathesz A, Szalai A, Jojart P, Budai J, Vass C, Kohazi-Kis A, Csete M, Bor Z |
5138 - 5145 |
Plasmonic structure generation by laser illumination of silica colloid spheres deposited onto prepatterned polymer-bimetal films Sipos A, Tohati H, Szalai A, Mathesz A, Gorbe M, Szabo T, Szekeres M, Hopp B, Csete M, Dekany I |
5146 - 5149 |
Application of Bessel beams to 2D microfabrication Li XF, Winfield RJ, O'Brien S, Crean GM |
5150 - 5153 |
Laser polymerization-based novel lift-off technique Bhuian B, Winfield RJ, Crean GM |
5154 - 5158 |
Ultrafast emission of ions during laser ablation of metal for 3D atom probe Vella A, Houard J, Vurpillot F, Deconihout B |
5159 - 5162 |
Emission spectra investigation of fs induced NPs probed by the ns laser pulse of a fs/ns DP-LIBS orthogonal configuration Santagata A, Albano G, Spera D, Teghil R, Villani P, Parisi GP, De Bonis A, Sordelet DJ |
5163 - 5166 |
Adaptive control of femtosecond laser ablation plasma emission Guillermin M, Liebig C, Garrelie F, Stoian R, Loir AS, Audouard E |
5167 - 5171 |
Time resolved Nomarski interferometery of laser produced plasma plumes Hough P, McLoughlin C, Kelly TJ, Harilal SS, Mosnier JP, Costello JT |
5172 - 5176 |
Characterization of pigments used in painting by means of laser-induced plasma and attenuated total reflectance FTIR spectroscopy Mateo MP, Ctvrtnickova T, Nicolas G |
5177 - 5180 |
Gas phase kinetic and optical emission spectroscopy studies in plasma-enhanced hot filament catalytic CVD production of carbon nanotubes Gulas M, Le Normand F, Veis P |
5181 - 5185 |
Numerical simulation of plasma dynamics in laser shock processing experiments Morales M, Porro JA, Blasco M, Molpeceres C, Ocana JL |
5186 - 5190 |
Influence of direct current plasma magnetron sputtering parameters on the material characteristics of polycrystalline copper films Chan KY, Luo PQ, Zhou ZB, Tou TY, Teo BS |
5191 - 5198 |
Physical aspects of the pulsed laser deposition technique: The stoichiometric transfer of material from target to film Schou J |
5199 - 5205 |
Current state-of-the-art of pulsed laser deposition of optical waveguide structures: Existing capabilities and future trends Eason RW, May-Smith TC, Grivas C, Darby MSB, Shepherd DP, Gazia R |
5206 - 5210 |
Femtosecond pulsed laser deposition of nanostructured TiO2 films Sanz M, Walczak M, de Nalda R, Oujja M, Marco JF, Rodriguez J, Izquierdo JG, Banares L, Castillejo M |
5211 - 5214 |
Temporally and spectrally resolved analysis of a copper plasma plume produced by ultrafast laser ablation Wang X, Amoruso S, Xia J |
5215 - 5219 |
Plasma plume photography and spectroscopy of Fe-Oxide materials Viskup R, Praher B, Stehrer T, Jasik J, Wolfmeir H, Arenholz E, Pedarnig JD, Heitz J |
5220 - 5223 |
Nanostructured thin films obtained by ultra-short pulse laser deposition of vanadium carbide Teghil R, De Bonis A, Galasso A, Villani P, Santagata A, Ferro D, Barinov SM |
5224 - 5227 |
Ultrafast pulsed laser deposition as a method for the synthesis of innovative magnetic films Iannotti V, Amoruso S, Ausanio G, Barone AC, Campana C, Wang X, Lanotte L |
5228 - 5231 |
Mg-based photocathodes prepared by ns, ps and fs PLD for the production of high brightness electron beams Miglietta P, Cultrera L, Cojanu C, Papadopoulou EL, Perrone A |
5232 - 5235 |
On the growth of gadolinia-doped ceria by pulsed laser deposition Pryds N, Rodrigo K, Linderoth S, Schou J |
5236 - 5239 |
KrF pulsed laser deposition of La5Ca9Cu24O41 thin films on various substrates Pervolaraki M, Athanasopoulos GI, Saint-Martin R, Revcolevschi A, Giapintzakis J |
5240 - 5244 |
RHEED study of titanium dioxide with pulsed laser deposition Rasmussen IL, Pryds N, Schou J |
5245 - 5247 |
Thin films of semiconducting lithium ferrite produced by pulsed laser deposition Gunning RD, Rode K, Sofin SRG, Venkatesan M, Coey JMD, Shvets IV, Lunney JG |
5248 - 5251 |
Nanostructured high valence silver oxide produced by pulsed laser deposition Dellasega D, Facibeni A, Di Fonzo F, Russo V, Conti C, Ducati C, Casari CS, Bassi AL, Bottani CE |
5252 - 5255 |
Pulsed laser deposition and characterization of nitrogen-substituted SrTiO3 thin films Marozau I, Shkabko A, Dinescu G, Dobeli M, Lippert T, Logvinovich D, Mallepell M, Schneider CW, Weidenkaff A, Wokaun A |
5256 - 5259 |
Nanostructural pulse laser-deposited Ag(Tl)SbS semiconductor thin films: Growth dynamics, structural and electrical properties Panchenko L, Khlyap H, Laptev V |
5260 - 5263 |
Chemical composition of ZrC thin films grown by pulsed laser deposition Craciun D, Socol G, Stefan N, Bourne G, Craciun V |
5264 - 5266 |
Fabrication of Mg-doped ZnO thin films by laser ablation of Zn:Mg target Kim TH, Park JJ, Nam SH, Park HS, Cheong NR, Song JK, Park SM |
5267 - 5270 |
Structural and morphological characterization of TiO2 nanostructured films grown by nanosecond pulsed laser deposition Walczak M, Papadopoulou EL, Sanz M, Manousaki A, Marco JF, Castillejo M |
5271 - 5274 |
AlN:Cr thin films synthesized by pulsed laser deposition: Studies by X-ray diffraction and spectroscopic ellipsometry Szekeres A, Bakalova S, Grigorescu S, Cziraki A, Socol G, Ristoscu C, Mihailescu IN |
5275 - 5279 |
Structure and optical anisotropy of pulsed-laser deposited TiO2 films for optical applications Stankova NE, Dimitrov IG, Stoyanchov TR, Atanasov PA, Kovacheva D |
5280 - 5283 |
Optical study of BST films combining ellipsometry and reflectivity Zelezny V, Chvostova D, Pajasova L, Jelinek M, Kocourek T, Danis S, Valvoda V |
5284 - 5287 |
Pulsed laser deposited Er3+,Yb3+:YVO4 waveguiding films on MgO/Si substrates Milev DR, Atanasov PA, Dikovska AO, Dimitrov IG, Petrov KP, Avdeev GV |
5288 - 5291 |
Structural investigations of ITO-ZnO films grown by the combinatorial pulsed laser deposition technique Craciun D, Socol G, Stefan N, Miroiu M, Mihailescu IN, Galca AC, Craciun V |
5292 - 5294 |
Highly oriented crystalline Er:YAG and Er:YAP layers prepared by PLD and annealing Remsa J, Jelinek M, Kocourek T, Oswald J, Studnicka V, Cernansky M, Uherek F, Jelinek M |
5295 - 5298 |
Pulsed-laser deposition of smooth thin films of Er, Pr and Nd doped glasses Epurescu G, Vlad A, Bodea MA, Vasiliu C, Dumitrescu O, Niciu H, Elisa M, Siraj K, Pedarnig JD, Bauerle D, Filipescu M, Nedelcea A, Galca AC, Grigorescu CEA, Dinescu M |
5299 - 5302 |
Morphological and optical properties of silicon thin films by PLD Ayouchi R, Schwarz R, Melo LV, Ramalho R, Alves E, Marques CP, Santos L, Almeida R, Conde O |
5303 - 5306 |
Influence of the substrate material on the properties of pulsed laser deposited thin Li1+xMn2O4-delta films Simmen F, Lippert T, Novak P, Neuenschwander B, Dobeli M, Mallepell M, Wokaun A |
5307 - 5311 |
Laser ablation of AsxSe100-x chalcogenide glasses: Plume investigations Focsa C, Nemec P, Ziskind M, Ursu C, Gurlui S, Nazabal V |
5312 - 5317 |
Shallow hydroxyapatite coatings pulsed laser deposited onto Al2O3 substrates with controlled porosity: correlation of morphological characteristics with in vitro testing results Sima F, Ristoscu C, Stefan N, Dorcioman G, Mihailescu IN, Sima LE, Petrescu SM, Palcevskis E, Krastins J, Zalite I |
5318 - 5321 |
Characterization of pulsed laser deposited chalcogenide thin layers Petkova T, Popov C, Hineva T, Petkov P, Socol G, Axente E, Mihailescu CN, Mihailescu IN, Reithmaier JP |
5322 - 5328 |
Foamy coating obtained by laser ablation of glass ceramic substrates at high temperature Sola D, Pena JI |
5329 - 5333 |
Laser ablation of powdered samples and analysis by means of laser-induced breakdown spectroscopy Ctvrtnickova T, Cabalin L, Laserna J, Kanicky V, Nicolas G |
5334 - 5337 |
Titanium oxide nanostructured films by reactive pulsed laser deposition Fusi M, Russo V, Casari CS, Bassi AL, Bottani CE |
5338 - 5341 |
Particle diagnostics of a ZnO laser ablation plume for nanostructured material deposition McLoughlin C, Hough P, Costello J, Mosnier JP |
5342 - 5345 |
Liquids microprinting through laser-induced forward transfer Serra P, Duocastella M, Fernandez-Pradas JM, Morenza JL |
5346 - 5350 |
Femtosecond laser writing of nanostructures on bulk Al via its ablation in air and liquids Stratakis E, Zorba V, Barberoglou M, Fotakis C, Shafeev GA |
5351 - 5354 |
Synthesis and characterization of TiOx nanoparticles prepared by pulsed-laser ablation of Ti target in water Nikolov AS, Atanasov PA, Milev DR, Stoyanchov TR, Deleva AD, Peshev ZY |
5355 - 5358 |
Formation of ultrathin nanocomposite SiO2:nc-Au structures by Pulsed Laser Deposition Zenkevich AV, Lebedinskii YY, Timofeyev A, Isayev IA, Tronin VN |
5359 - 5362 |
Fast synthesis of ZnO nanostructures by laser-induced chemical liquid deposition Fauteux C, Smirani R, Pegna J, El Khakani MA, Therriault D |
5363 - 5367 |
Preparation of ZnO nanopowders by thermal plasma and characterization of photo-catalytic property Kim SJ, Park DW |
5368 - 5372 |
Lamp-assisted CVD of carbon micro/nano-structures using metal catalysts and CH2I2 precursor Rashid A, Landstrom L, Brodoceanu D, Piglmayer K |
5373 - 5377 |
Preparation and characterization of nitrogen-doped TiO2 nanoparticles by the laser pyrolysis of N2O-containing gas mixtures Alexandrescu R, Scarisoreanu M, Morjan I, Birjega R, Fleaca C, Luculescu C, Soare I, Cretu O, Negrila CC, Lazarescu N, Ciupina V |
5378 - 5381 |
Radiofrequency plasma beam deposition of various forms of carbon based thin films and their characterization Vizireanu S, Stoica SD, Mitu B, Husanu MA, Galca A, Nistor L, Dinescu G |
5382 - 5385 |
Hydroxylapatite nanoparticles obtained by fiber laser-induced fracture Boutinguiza M, Lusquinos F, Riveiro A, Comesana R, Pou J |
5386 - 5390 |
Magnetic properties of core-shell catalyst nanoparticles for carbon nanotube growth Fleaca CT, Morjan I, Alexandrescu R, Dumitrache F, Soare I, Gavrila-Florescu L, Le Normand F, Derory A |
5391 - 5395 |
Nanoscale characterization of single Au nanorods by confocal microscopy Zuchner T, Wackenhut F, Failla AV, Meixner AJ |
5396 - 5400 |
Role of plasma activation in tailoring the nanostructure of multifunctional oxides thin films Giangregorio MM, Losurdo M, Capezzuto P, Bruno G |
5401 - 5404 |
Pulsed plasma ion source to create Si nanocrystals in SiO2 substrates Lorusso A, Nassisi V, Congedo G, Lovergine N, Velardi L, Prete P |
5405 - 5408 |
Time-resolved transmission study of fused silica during laser-induced backside dry etching Smausz T, Zalatnai Z, Papdi B, Csako T, Bor Z, Hopp B |
5409 - 5413 |
Synthesis of nano-sized antimony-doped tin oxide (ATO) particles using a DC arc plasma jet Jung DW, Park DW |
5414 - 5417 |
Morphology control and electron field emission properties of high-ordered Si nanoarrays fabricated by modified nanosphere lithography Xu L, Li W, Xu J, Zhou J, Wu LC, Zhang XG, Ma ZY, Chen KJ |
5418 - 5420 |
Modification of semiconductor materials using laser-produced ion streams additionally accelerated in the electric fields Rosinski M, Badziak B, Parys P, Wolowski J, Pisarek M |
5421 - 5424 |
Synthesis of carbon nanotubes and iron oxide nanoparticles in MW plasma torch with Fe(CO)(5) in gas feed Zajickova L, Synek P, Jasek O, Elias M, David B, Bursik J, Pizurova N, Hanzlikova R, Lazar L |
5425 - 5429 |
Bio-inspired water repellent surfaces produced by ultrafast laser structuring of silicon Barberoglou M, Zorba V, Stratakis E, Spanakis E, Tzanetakis P, Anastasiadis SH, Fotakis C |
5430 - 5434 |
Shadowgraphy investigation of laser-induced forward transfer: Front side and back side ablation of the triazene polymer sacrificial layer Fardel R, Nagel M, Nuesch F, Lippert T, Wokaun A |
5435 - 5438 |
In situ bioconjugation-Novel laser based approach to pure nanoparticle-conjugates Petersen S, Jakobi J, Barcikowski S |
5439 - 5443 |
Characterization of organic material micro-structures transferred by laser in nanosecond and picosecond regimes Rapp L, Cibert C, Alloncle AP, Delaporte P |
5444 - 5447 |
Laser direct writing of combinatorial libraries of idealized cellular constructs: Biomedical applications Schiele NR, Koppes RA, Corr DT, Ellison KS, Thompson DM, Ligon LA, Lippert TKM, Chrisey DB |
5448 - 5452 |
Small size plasma tools for material processing at atmospheric pressure Ionita ER, Ionita MD, Stancu EC, Teodorescu M, Dinescu G |
5453 - 5457 |
Laser- and UV-assisted modification of polystyrene surfaces for control of protein adsorption and cell adhesion Pfleging W, Torge M, Bruns M, Trouillet V, Welle A, Wilson S |
5458 - 5460 |
Pulsed laser ablation of pepsin on an inorganic substrate Cicco N, Lopizzo T, Marotta V, Morone A, Verrastro M, Viggiano V |
5461 - 5465 |
Fluorocarbon plasmas for nanotexturing of polymers: A route to water-repellent antireflective surfaces Di Mundo R, De Benedictis V, Palumbo F, d'Agostino R |
5466 - 5470 |
The fabrication of polymer-based evanescent optical waveguide for biosensing Kwon SW, Yang WS, Lee HM, Kim WK, Son GS, Yoon DH, Lee SD, Lee HY |
5471 - 5475 |
Micro-patterning for polymer electrolyte fuel cells: Single pulse laser ablation of aluminum films from glassy carbon Seyfang BC, Fardel R, Lippert T, Scherer GG, Wokaun A |
5476 - 5479 |
Bioglass thin films for biomimetic implants Berbecaru C, Alexandru HV, Ianculescu A, Popescu A, Socol G, Sima F, Mihailescu I |
5480 - 5485 |
Thin films of Cu(II)-o,o'-dihydroxy azobenzene nanoparticle-embedded polyacrylic acid (PAA) for nonlinear optical applications developed by matrix assisted pulsed laser evaporation (MAPLE) Constantinescu C, Emandi A, Vasiliu C, Negrila C, Logofatu C, Cotarlan C, Lazarescu M |
5486 - 5490 |
Biocompatible and bioactive nanostructured glass coatings synthesized by pulsed laser deposition: In vitro biological tests Popescu AC, Sima F, Duta L, Popescu C, Mihailescu IN, Capitanu D, Mustata R, Sima LE, Petrescu SM, Janackovic D |
5491 - 5495 |
Multifunctional thin films of lactoferrin for biochemical use deposited by MAPLE technique Constantinescu C, Palla-Papavlu A, Rotaru A, Florian P, Chelu F, Icriverzi M, Nedelcea A, Dinca V, Roseanu A, Dinescu M |
5496 - 5498 |
Thin films of polymer mimics of cross-linking mussel adhesive proteins deposited by matrix assisted pulsed laser evaporation Cristescu R, Mihailescu IN, Stamatin I, Doraiswamy A, Narayan RJ, Westwood G, Wilker JJ, Stafslien S, Chisholm B, Chrisey DB |
5499 - 5502 |
Laser fabricated microchannels inside photostructurable glass-ceramic Fernandez-Pradas JM, Serrano D, Serra P, Morenza JL |
5503 - 5506 |
Radial inhomogeneities induced by fiber diameter in electrically assisted LFZ growth of Bi-2212 Carrasco MF, Silva RA, Silva NJO, Silva RF, Vieira JM, Costa FM |
5507 - 5510 |
Investigation of thermo-mechanical behaviour of diffractive optical elements for CO2 lasers Neiss E, Flury M, Fontaine J |
5511 - 5514 |
Heterogeneous atoms in laser-induced synthesis of carbon black Popovici E, Florescu LG, Soare I, Scarisoreanu M, Sandu I, Prodan G, Fleaca CT, Morjan I, Voicu I |
5515 - 5518 |
Growth of titanium oxynitride layers by short pulsed Nd:YAG laser treatment of Ti plates: Influence of the cumulated laser fluence Lavisse L, Sahour MC, Jouvard JM, Pillon G, de Lucas MCM, Bourgeois S, Grevey D |
5519 - 5522 |
Breakdown limits of optical multimode fibers for the application of nanosecond laser pulses at 532 nm and 1064 nm wavelength Mann G, Vogel J, Zoheidi M, Eberstein M, Kruger J |
5523 - 5527 |
Manufacturing of fine-structured 3D porous filter elements by selective laser melting Yadroitsev I, Shishkovsky I, Bertrand P, Smurov I |
5528 - 5531 |
Crystallization of hydrogenated amorphous silicon carbon films with laser and thermal annealing Basa DK, Ambrosone G, Coscia U, Setaro A |
5532 - 5536 |
Optimization of a laser mitigation process in damaged fused silica Palmier S, Gallais L, Commandre M, Cormont P, Courchinoux R, Lamaignere L, Rullier JL, Legros P |
5537 - 5541 |
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation Ellman M, Rodriguez A, Perez N, Echeverria M, Verevkin YK, Peng CS, Berthou T, Wang Z, Olaizola SM, Ayerdi I |
5542 - 5545 |
Complementary use of the Raman and XRF techniques for non-destructive analysis of historical paint layers Sawczak M, Kaminska A, Rabczuk G, Ferretti M, Jendrzejewski R, Sliwinski G |
5546 - 5548 |
Micro-Raman investigation of stress distribution in laser drilled via structures Wasyluk J, Adley D, Perova TS, Rodin AM, Callaghan J, Brennan N |
5549 - 5552 |
Direct observation of phase transitions by time-resolved pyro/reflectometry of KrF laser-irradiated metal oxides and metals Semmar N, Tebib M, Tesar J, Puscas NN, Amin-Chalhoub E |
5553 - 5556 |
Laser cladding of tungsten carbides (Spherotene (R)) hardfacing alloys for the mining and mineral industry Amado JM, Tobar MJ, Alvarez JC, Lamas J, Yanez A |
5557 - 5560 |
Micromachining of glass by the third harmonic of nanosecond Nd:YVO4 laser Ramil A, Lamas J, Alvarez JC, Lopez AJ, Saavedra E, Yanez A |
5561 - 5564 |
Photo-thermal effects induced by KrF laser in complex oxides investigated by time resolved pyrometry: Cases of Er-doped ZnO and Y2O3 Amin-Chalhoub E, Semmar N, Mathias J |
5565 - 5568 |
Nanostructural self-organization under selective laser sintering of exothermic powder mixtures Shishkovsky I, Morozov Y, Smurov I |
5569 - 5573 |
Experimental investigation on laser removal of carbon and tungsten particles Vatry A, Habib MN, Delaporte P, Sentis M, Grojo D, Grisolia C, Rosanvallon S |
5574 - 5578 |
Study of surface layers and ejected powder formed by oxidation of titanium substrates with a pulsed Nd:YAG laser beam Shupyk I, Lavisse L, Jouvard JM, de Lucas MCM, Bourgeois S, Herbst F, Piquemal JY, Bozon-Verduraz F, Pilloz M |
5579 - 5583 |
Laser cleaning of varnishes and contaminants on brass Mateo MP, Ctvrtnickova T, Fernandez E, Ramos JA, Yanez A, Nicolas G |
5584 - 5587 |
Metal matrix composite production by means of laser dispersing of SiC and WC powder in Al alloy Jendrzejewski R, Van Acker K, Vanhoyweghen D, Sliwinski G |
5588 - 5590 |
Hybrid laser-MIG welding of aluminum alloys: The influence of shielding gases Campana G, Ascari A, Fortunato A, Tani G |
5591 - 5594 |
Laser structuring of metal surfaces: Micro-mechanical interlocking Byskov-Nielsen J, Balling P |
5595 - 5599 |
Two-dimensional numerical modelling of radiation transfer in powder beds at selective laser melting Gusarov AV, Smurov I |
5600 - 5604 |
Functionalized polyvinyl alcohol derivatives thin films for controlled drug release and targeting systems: MAPLE deposition and morphological, chemical and in vitro characterization Cristescu R, Popescu C, Popescu AC, Grigorescu S, Duta L, Mihailescu IN, Caraene G, Albulescu R, Albulescu L, Andronie A, Stamatin I, Ionescu A, Mihaiescu D, Buruiana T, Chrisey DB |
5605 - 5610 |
Laser processing of polyethylene glycol derivative and block copolymer thin films Cristescu R, Popescu C, Popescu AC, Grigorescu S, Duta L, Mihailescu IN, Andronie A, Stamatin I, Ionescu OS, Mihaiescu D, Buruiana T, Chrisey DB |
5611 - 5614 |
MAPLE prepared polymeric thin films for non-linear optic applications Socol G, Mihailescu IN, Albu AM, Antohe S, Stanculescu F, Stanculescu A, Mihut L, Preda N, Socol M, Rasoga O |
5615 - 5619 |
Optical properties of titanium oxycarbide thin film Marques L, Pinto HM, Fernandes AC, Banakh O, Ramos FVMMD |
5620 - 5625 |
Laser annealing of amorphous carbon films Cappelli E, Scilletta C, Orlando S, Valentini V, Servidori M |
5626 - 5632 |
Comparative study of grain sizes and orientation in microstructured Au, Pt and W thin films designed by laser interference metallurgy Gachot C, Catrin R, Lasagni A, Schmid U, Mucklich F |
5633 - 5636 |
Laser shock microforming of thin metal sheets Ocana JL, Morales M, Garcia-Ballesteros JJ, Porro JA, Garcia O, Molpeceres C |
5637 - 5640 |
Numerical study of melted particles crush metallic substrates and the interaction between particles and a plasma beam in the thermal projection process Kriba I, Djebaili A |
5641 - 5646 |
Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching Gottmann J, Wortmann D, Horstmann-Jungemann M |
5647 - 5650 |
Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII) Vervisch V, Larmande Y, Delaporte P, Sarnet T, Sentis M, Etienne H, Torregrosa F, Cristiano F, Fazzini PF |