3 - 7 |
Amorphous silicon-carbon alloys: a promising but complex and very diversified series of materials Solomon I |
8 - 19 |
Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques Ferreira I, Costa MEV, Pereira L, Fortunato E, Martins R, Ramos AR, Silva MF |
20 - 26 |
Silicon carbide: from amorphous to crystalline material Foti G |
27 - 36 |
Growth of silicon carbide: process-related defects Yakimova R, Syvajarvi M, Iakimov T, Jacobsson H, Kakanakova-Georgieva A, Raback P, Janzen E |
37 - 42 |
MBE growth and properties of SiC multi-quantum well structures Fissel A, Kaiser U, Schroter B, Richter W, Bechstedt F |
43 - 49 |
Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique Mandracci P, Chiodoni A, Cicero G, Ferrero S, Giorgis F, Pirri CF, Barucca G, Musumeci P, Reitano R |
50 - 54 |
SiC(100) ordered film growth by C-60 decomposition on Si(100) surfaces Moras P, Mahne N, Ferrari L, Pesci A, Capozi M, Aversa L, Jha SN, Verucchi R, Iannotta S, Pedio M |
55 - 59 |
Surface preparation of 4H-SiC substrates for hot-wall CVD of SiC layers Wagner G, Doerschel J, Gerlitzke A |
60 - 65 |
Mass spectroscopy analysis during the deposition of a-SiC : H and a-C : H films produced by hot wire and hot wire plasma-assisted techniques Ferreira I, Silva V, Aguas H, Fortunato E, Martins R |
66 - 71 |
Growth chemistry of SiC alloys from SiF4-CH4 plasmas Cicala G, Capezzuto P, Bruno G, Rossi MC |
72 - 78 |
Growth of SiC epitaxial layers on porous surfaces of varying porosity Saddow SE, Mynbaeva M, Smith MCD, Smirnov AN, Dimitriev V |
79 - 83 |
Electrical characterization of SiC/Si heterostructures with Ge-modified interfaces Pezoldt J, Forster C, Weih P, Masri P |
84 - 89 |
On the preparation of semi-insulating SiC bulk crystals by the PVT technique Bickermann M, Hofmann D, Straubinger TL, Weingartner R, Wellmann PJ, Winnacker A |
90 - 95 |
Temperature dependence of acetylene adsorption and reaction on Si(111)-(7 x 7) De Renzi V, Biagi R, del Pennino U |
96 - 100 |
Formation of intermediate SiCN interlayer during deposition of CNx on a-Si : H or a-SiC : H thin films Mitu B, Dinescu G, Budianu E, Ferrari A, Balucani M, Lamedica G, Dauscher A, Dinescu M |
101 - 106 |
Correlation between the carbon and hydrogen contents with the gas species and the plasma impedance of silicon carbide films produced by PECVD technique Martins R, Silva V, Aguas H, Cabrita A, Ferreira I, Fortunato E |
107 - 112 |
Correlations between properties and applications of the CVD amorphous silicon carbide films Kleps I, Angelescu A |
113 - 117 |
C adsorption and diffusion at the Si(001) surface: implications for SiC growth Cicero G, Catellani A |
118 - 122 |
Laser CVD of cubic SiC nanocrystals Kamlag Y, Goossens A, Colbeck I, Schoonman J |
123 - 127 |
Crystallisation mechanism of amorphous silicon carbide Calcagno L, Musumeci P, Roccaforte F, Bongiorno C, Foti G |
128 - 134 |
Peculiarities of preparing a-SiC : H films from methyltrichlorosilane Rusakov GV, Ivashchenko LA, Ivashchenko VI, Porada OK |
137 - 143 |
Effects of short-range disorder upon electronic properties of a-SiC alloys Ivashchenko VI, Shevchenko VI |
144 - 149 |
Transport mechanism in high resistive silicon carbide heterostructures Louro P, Vieira M, Vygranenko Y, Fernandes M, Schwarz R, Schubert M |
150 - 155 |
Spectroscopic ellipsometry analysis of nanocrystalline silicon carbide obtained at low temperature Kerdiles S, Madelon R, Rizk R |
156 - 160 |
Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure Rebohle L, Gebel T, Frob H, Reuther H, Skorupa W |
161 - 166 |
Composition analysis of SiO2/SiC interfaces by electron spectroscopic measurements using slope-shaped oxide films Hijikata Y, Yaguchi H, Yoshikawa M, Yoshida S |
167 - 172 |
Characterization of single-crystal SiC polytypes using X-ray and Auger photoelectron spectroscopy Wolan JT, Grayson BA, Akshoy G, Saddow SE |
173 - 177 |
A Monte Carlo study of low field transport in Al-doped 4H-SiC Martinez A, Lindefelt U, Hjelm M, Nilsson HE |
178 - 182 |
Non-Rutherford backscattering studies of SiC/SIMOX structures Chen KW, Yu YH, Lei YM, Cheng LL, Sundaraval B, Luo EZ, Wong SP, Wilson IH, Chen LZ, Ren CX, Zou SC |
183 - 189 |
Dopant profile measurements in ion implanted 6H-SiC by scanning capacitance microscopy Giannazzo F, Calcagno L, Roccaforte F, Musumeci P, La Via F, Raineri V |
190 - 193 |
Particle and light-induced luminescence degradation in a-SiC : H Reitano R, Baeri A, Musumeci P |
194 - 198 |
Full band Monte Carlo study of bulk and surface transport properties in 4H and 6H-SiC Hjelm M, Bertilsson K, Nilsson HE |
199 - 203 |
Numerical study of Bloch electron dynamics in wide band-gap semiconductors Nilsson HE, Martinez A, Sannemo U |
204 - 208 |
Structural and optical properties of a-Si1-xCx : H grown by plasma enhanced CVD Giorgis F, Ambrosone G, Coscia U, Ferrero S, Mandracci P, Pirri CF |
209 - 213 |
Spreading resistance measurements on nanocrystalline SiC produced by ion beam induced crystallisation Madhusoodanan KN, Heera V, Panknin D, Skorupa W |
214 - 220 |
Plausible interpretation of optical absorption spectra of a-SiC : H thin films Ivashchenko VI, Rusakov GV, Shevchenko VI, Klymenko AS, Ivashchenko LA, Popov VM |
221 - 225 |
Characterization of crystalline-amorphous transition by heavy C doping of poly-Si (poly-Si : C) Yamamoto Y, Fursenko O, Kopke K, Bauer J, Bugiel E, Kruger D, Zaumseil P, Tillack B |
229 - 236 |
Vacancy-related defects in ion-beam and electron irradiated 6H-SiC Bratus VY, Petrenko TT, von Bardeleben HJ, Kalinina EV, Hallen A |
237 - 241 |
Electron irradiation induced defects in monocrystalline 4H-SiC and 6H-SiC: the influence of the electron energy and doping von Bardeleben HJ, Canon JL |
242 - 246 |
Behavior of background impurities in thick 4H-SiC epitaxial layers Kakanakova-Georgieva A, Yakimova R, Syvajarvi M, Janzen E |
247 - 251 |
Evolution of ion implantation-caused vacancy-type defects in 6H-SiC probed by slow positron implantation spectroscopy Anwand W, Brauer G, Skorupa W |
252 - 256 |
Role of the defects under porous silicon carbide formation Savkina NS, Sorokin LM, Hutchison JL, Sloan J, Tregubova AS, Mosina GN, Shuman VB, Ratnikov VV |
257 - 262 |
Hydrogen-boron complex formation and dissociation in 4H-silicon carbide Janson MS, Hallen A, Linnarsson MK, Svensson BG |
263 - 267 |
Nitrogen passivation by implantation-induced point defects in 4H-SiC epitaxial layers Aberg D, Hallen A, Pellegrino P, Svensson BG |
268 - 272 |
Comparative EPR study of hydrogenated and unhydrogenated amorphous silicon carbide thin films Christidis T, Tabbal M, Isber S, El Khakani MA, Chaker M |
273 - 277 |
Symmetry, spin state and hyperfine parameters of vacancies in cubic SiC Petrenko TT, Petrenko TL, Bratus VY, Monge JL |
278 - 283 |
PES and LEER study of hydrogen- and oxygen-terminated 6H-SiC(0001) and (0 0 0(1)over-bar) surfaces Sieber N, Seyller T, Graupner R, Ley L, Mikalo R, Hoffmann P, Batchelor DR, Schmeisser D |
287 - 294 |
Contact formation in SiC devices Pecz B |
295 - 298 |
Improvement of high temperature stability of nickel contacts on n-type 6H-SiC Roccaforte F, La Via F, Raineri V, Calcagno L, Musumeci P |
299 - 306 |
Formation of metal disilicide layers contacting ion beam-synthesized, buried 3C-SiC layers in silicon Lindner JKN, Wenzel S, Stritzker B |
307 - 316 |
p-type doping of SiC by high dose Al implantation - Problems and progress Heera V, Panknin D, Skorupa W |
317 - 322 |
A modified oxidation procedure for ion-implanted silicon carbide devices annealed at low temperatures Capano MA |
323 - 329 |
Influence of ion implantation on the quality of 4H-SiC CVD epitaxial layers Kalinina E, Kholujanov G, Solov'ev V, Strel'chuk A, Kossov V, Yafaev R, Kovarskii, Shchukarev A, Obyden S, Saparin G, Ivannikov P, Hallen A, Konstantinov A |
330 - 335 |
Investigation of Al-implanted 6H-and 4H-SiC layers after fast heating rate annealings Ottaviani L, Lazar M, Locatelli ML, Monteil Y, Heera V, Voelskow M, Skorupa W |
336 - 339 |
Writing cobalt FIB implantation into 6H : SiC Bischoff L, Teichert J |
340 - 345 |
Oxide growth on SiC(0001) surfaces Schmeisser D, Batchelor DR, Mikalo RP, Hoffmann P, Lloyd-Spetz A |
346 - 349 |
Preparation and characterization of SiO2/6H-SiC metal-insulator-semiconductor structure using TEOS as source material Kamimura K, Kobayashi D, Okada S, Mizuguchi T, Ryu E, Hayashibe R, Nagaune F, Onuma Y |
350 - 355 |
Synthesis of SiC on Si(111) at moderate temperatures by supersonic C-60 beams Aversa L, Verucchi R, Ciullo G, Ferrari L, Moras P, Pedio M, Pesci A, Iannotta S |
356 - 361 |
Laser crystallization of amorphous SiC thin films on glass Urban S, Falk F |
362 - 366 |
Numerical and experimental analysis of pulsed excimer laser processing of silicon carbide Dutto C, Fogarassy E, Mathiot D |
367 - 371 |
Ion beam synthesis of n-type doped SiC layers Serre C, Panknin D, Perez-Rodriguez A, Romano-Rodriguez A, Morante JR, Kogler R, Skorupa W, Esteve J, Acero MC |
372 - 376 |
Focused ion beam sputtering investigations on SiC Bischoff L, Teichert J, Heera V |
377 - 382 |
The beneficial role of flash lamp annealing on the epitaxial growth of the 3C-SiC on Si Panknin D, Stoemenos J, Eickhoff M, Heera V, Voelskow M, Skorupa W |
383 - 386 |
(AlN)(x)(SiC)(1-x) buried layers implanted in 6H-SiC: a theoretical study of their optimized composition Masri P, Laridjani MR, Pezoldt J, Yankov RA, Skorupa W, Averous M |
387 - 390 |
Chemical sputtering of amorphous silicon carbide under hydrogen bombardment Salonen E, Nordlund K, Keinonen J, Wu CH |
393 - 398 |
Progress towards SiC products Harris CI, Savage S, Konstantinov A, Bakowski M, Ericsson P |
399 - 403 |
Interface state density and channel mobility for 4H-SiC MOSFETs with nitrogen passivation Chung GY, Williams JR, Tin CC, McDonald K, Farmer D, Chanana RK, Pantelides ST, Holland OW, Feldman LC |
404 - 407 |
Experimental characterization of a 4H-SiC high voltage current limiting device Nallet F, Planson D, Godignon P, Locatelli ML, Lazar M, Chante JP |
408 - 412 |
Readout improvement in large area a-SiC : H-based image sensors Fernandes M, Vygranenko Y, Vieira M |
413 - 418 |
Tungsten, nickel, and molybdenum Schottky diodes with different edge termination Weiss R, Frey L, Ryssel H |
419 - 424 |
Electrical characteristics of p-3C-SiC/n-6H-SiC heterojunctions grown by sublimation epitaxy on 6H-SiC substrates Lebedev AA, Strel'chuk AM, Davydov DV, Savkina NS, Tregubova AS, Kuznetsov AN, Solov'ev VA, Poletaev NK |
425 - 430 |
High quality SiC applications in radiation dosimetry Bruzzi M, Nava F, Pini S, Russo S |
431 - 436 |
Radiation hardness of SiC based ions detectors for influence of the relative protons Ivanov AM, Strokan NB, Davydov DV, Savkina NS, Lebedev AA, Mironov YT, Riabov GA, Ivanov EM |
437 - 442 |
Silicon carbide photodiodes: Schottky and PINIP structures Cabrita A, Pereira L, Brida D, Lopes A, Marques A, Ferreira I, Fortunato E, Martins R |
443 - 447 |
Thin film position sensitive detectors based on pin amorphous silicon carbide structures Cabrita A, Figueiredo J, Pereira L, Aguas H, Silva V, Brida D, Ferreira I, Fortunato E, Martins R |
448 - 454 |
Investigation of 4H-SiC Schottky diodes by ion beam induced charge (IBIC) technique Manfredotti C, Fizzotti F, Lo Giudice A, Paolini C, Vittone E, Nava F |
455 - 459 |
Triode structure of ion detector based on 6H-SiC epitaxial films Strokan NB, Ivanov AM, Davydov DV, Savkina NS, Bogdanova EV, Kuznetsov AN, Lebedev AA |
460 - 465 |
Electrophysical and photoelectrical properties of UV-range injection structures made of silicon carbide Asriyan HV, Gasparyan FV, Aroutiounian VM, Soukiassian P |
466 - 470 |
Sensitivity of p-n junction based on SiC doped with deep impurity acceptor levels Buniatyan VV, Gasparyan FV, Aroutiounian VV, Soukiassian P |
471 - 476 |
LSP image sensors based on SiC heterostructures Vieira M, Fernandes M, Fantoni A, Louro P, Vygranenko Y, Schwarz R, Schubert M |
477 - 482 |
Study of 6H-SiC high voltage bipolar diodes under reverse biases Isoird K, Lazar M, Ottaviani L, Locatelli ML, Raynaud C, Planson D, Chante JP |
483 - 486 |
Electrical characterization of Schottky diodes fabricated on SiC epitaxial layers grown on porous SiC substrates Kuznetsov NI, Mynbaeva MG, Melnychuk G, Dmitriev VA, Saddow SE |
XII - XIII |
Proceedings of the European Materials Research Society 2001-Symposium F - "Amorphous and crystalline silicon carbide: Material and applications" - Preface Calcagno L, Hallen A, Martins R, Skorupa W |